**Acknowledgements**

The work at Kyiv was funded by the Ministry of Education and Science of Ukraine (0119U100303). Financial support from the University of Vienna is also acknowledged.

**Author details**

Andriy Nadtochiy<sup>1</sup>

of Vienna, Austria

**153**

, Artem Podolian<sup>1</sup>

*Ultrasonic Processing of Si and SiGe for Photovoltaic Applications*

*DOI: http://dx.doi.org/10.5772/intechopen.96939*

\*Address all correspondence to: viktor.schlosser@univie.ac.at

provided the original work is properly cited.

1 Faculty of Physics, Taras Shevchenko National University of Kyiv, Kyiv, Ukraine

2 Department of Electronic Properties of Materials, Faculty of Physics, University

© 2021 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/ by/3.0), which permits unrestricted use, distribution, and reproduction in any medium,

, Oleg Korotchenkov<sup>1</sup> and Viktor Schlosser<sup>2</sup>

\*
