**5.2 Characterization of silver nanoparticles**

The prepared AgNPs were characterized using SEM, FESEM, HRTEM, SAXS, FTIR Spectroscopy, and UV–Vis spectroscopy. The SEM images of samples were obtained from JEOL Scanning Microscope JSM-6400. The surface morphology and elemental analysis of the silver nanoparticles were studies using JSM-7800F Field Emission Electron Scanning Microscope (FESEM), integrated with energydispersive x-ray spectroscopy (EDS). High resolution TEM analysis was carried out using Hitachi H-800 electron microscope at 200 kV acceleration to determine the size distribution and elemental composition of samples respectively. Small angle x-ray scattering (SAXS) spectroscopy was performed with SAXSpace Spectrometer from Anton-Paar, Graz, Austria, using a solid sample. The X-ray scattering spectra were plotted with a SAXdrive software. GIFT software was used to Fourier transform the scattering data to obtain the pair distance distribution function (PDDF) and size distribution spectra. The functional groups of the nanomaterials were done on a Perkin Elmer FTIR spectrometer Frontier (Spectrum 100 spectrometer) in the range

#### **Figure 5.**

*Electro-micrograph image of (a) SEM analysis, and (b) FESEM analysis at a magnification of x10,000.*

*Nanomaterial-Enhanced Receptor Technology for Silicon On-Chip Biosensing Application DOI: http://dx.doi.org/10.5772/intechopen.94249*

of 400–4000 cm−1 using the KBr pellet method. UV-vis spectra were acquired over the range of 200–800 nm using PerkinElma Lambda 650S UV/Visible Spectrometer. To produce graphs and curves that are clear enough for reporting, Origin 8.0 software was used to plots the data obtained from the characterization equipment.
