**5. Conclusion**

In this chapter, the state-of-the-art in MEMS resonant sensor is studied. Numerical models were presented to understand the operation of the ultra-precise, high sensitivity devices used for the bio applications. Key performance parameters such as mass sensitivity was derived for the different available outputs in the CR resonant mass sensors. From the recent case studies and a comparative analysis as provided in **Table 1**, it can be concluded that CR resonant biosensor is emerging as a new sensing standard in the MEMS community.
