**7. Conclusions**

The current designs and simulations as demonstrated in this chapter indicate that it would be possible to develop simple to advanced micro and even nano sensors directly on silicon chip, by means of Si AMLEDs and standard silicon integrated circuitry processing. The design of various on-chip nano-and micro-dimensioned sensors that can detect a variety of parameters using waveguide optics and intermediate evanescent- and waveguide-based receptor layers seems possible. The major advantage of such biosensors would be the micro-dimensioning and the integration of such sensors directly on the chip, in conjunction with adjacent on-chip optical processing circuitry. Sensitivity and selectivity of such biosensor devices can be enhanced by creating a layer of nanomaterials in the receptor cavity. Since monolayers of analytes can be detected through the diversion of waveguide traveling radiation into absorbed species with different refractive indices, or through the coupling of species with the evanescent electrical fields of waveguides, the sensors could be made extremely sensitive.
