**Author details**

Vinayak Pachkawade University of Liege, Belgium

\*Address all correspondence to: vpachkawade@uliege.be

© 2020 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/ by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

*Ultra-Precise MEMS Based Bio-Sensors DOI: http://dx.doi.org/10.5772/intechopen.93931*
