**4. Conclusions**

In summary, TEM/STEM with an energy-dispersive X-ray spectrometry corresponding to selected area diffraction patterns (SADP) is a powerful and accurate instrument to analysis and results from interpretation of nanomaterial lattice

structure. By using its technique, most of the nanomaterial structural properties can be characterized such as orientation relationship determination, phase identification, twinning, second phases, crystallographic information, dislocation, preferred orientation and texture, extra spots and streaks. In addition, steps of structural changes (lattice parameter and interplanar spacing) and reducing of nanoparticles and nano-grains sizes of different materials can be investigated by taking the EDPs of nanoparticles synthesis or nanostructuring process steps.
