**Chapter 4**

*Silicon Materials*

2008;**84**:1061-1067

surfcoat.2009.11.045

corsci.2011.07.011

Nc-MeN/a-SiNx nanostructure in order to tune macroscopic properties. New Trends and Developments. 2012: 483-503. DOI: 10.5772/51123

[99] Kertzman Z, Marchal J, Suarez M, Staia MH, Filip P, Kohli P, et al. Mechanical, tribological, and

biocompatibility properties of ZrN-Ag nanocomposite films. Journal of Biomedical Materials Research Part A.

[100] Tung HM, Huang JH, Tsai DG, Ai CF, Yu GP. Hardness and residual stress in nanocrystalline ZrN films: Effect of bias voltage and heat treatment. Materials Science and Engineering A. 2009;**500**(1-2):104-108. DOI: 10.1016/j.msea.2008.09.006

[101] Sandu CS, Harada S, Sanjinés R, Cavaleiro A. A unique approach to reveal the nanocomposite nc-MN/ SiN-layer architecture of thin films via electrical measurements. Surface and Coating Technology. 2010;**204**:1907-1913. DOI: 10.1016/j.

[102] Ahmed MS, Munroe P, Jiang ZT, Zhao X, Rickard W, Z-f Z, et al.

Corrosion behaviour of nanocomposite TiSiN coatings on steel substrates. Corrosion Science. 2011;**53**(11): 3678-3687. DOI: 10.1016/j.

[103] Ding JC, Wang QM, Liu ZR, Jeong S, Zhang TF, Kim KH. Influence of bias voltage on the microstructure, mechanical and corrosion properties of AlSiN films deposited by HiPIMS technique. Journal of Alloys and Compounds. 2019;**772**:112-121. DOI:

10.1016/j.jallcom.2018.09.063

Silicon influence on corrosion resistance of magnetron sputtered ZrN and ZrSiN thin films. Surface Engineering. 2018;**0**(0):1-8. DOI: 10.1080/02670844.2018.1548100

[104] Ferreira CP, Castro M d MR d, Tentardini EK, Lins V de FC, Saliba PA.

**44**
