Meet the editor

Dr. Steven H. Voldman is the first IEEE Fellow in the field of electrostatic discharge (ESD) for "Contributions in ESD protection in CMOS, SOI, and SiGe Technology." He received his degrees from the University of Buffalo, Massachusetts Institute of Technology (MIT), and the University of Vermont. Dr. Voldman was a member of development teams at IBM, the

Taiwan Semiconductor Manufacturing Corporation (TSMC), and Samsung. In 2018 he served as an International Visiting Scholar at Khon Kaen University in Thailand. Dr. Voldman is the author of a ten-book series and 150 technical papers, and recipient of 262 issued US patents. He initiated a university lecture program to Thailand, Malaysia, Singapore, United States, Korea, Taiwan, Philippines, Sri Lanka, Senegal, Swaziland, Zimbabwe, Nepal, and China.

Contents

**Section 1**

 and Nanogenerators *by Steven Voldman*

*by Chun-Yu Lin*

**Section 2**

**Section 3**

Nanogenerator

*by He Zhang and Liwei Quan*

**Preface III**

Electrostatic Design in CMOS **1**

**Chapter 1 3**

**Chapter 2 9**

Breakdown in Micro-gaps **27**

**Chapter 3 29**

Nanogenerators **49**

**Chapter 4 51**

**Chapter 5 69**

Theoretical Prediction and Optimization Approach to Triboelectric

Introductory Chapter: Electrostatic Discharge Breakdown in Micro-gaps

Low-C ESD Protection Design in CMOS Technology

Electrical Breakdown Behaviors in Microgaps

Nanogenerators from Electrical Discharge

*by Jie Wang, Di Liu, Linglin Zhou and Zhong Lin Wang*

*by Guodong Meng and Yonghong Cheng*

### Contents


Preface

As we enter the nanoelectronics era, electrostatic discharge (ESD) phenomena is still an important issue for everything from micro-electronics to nanostructures. One of the driving forces for this interest is the concern of the ability to manufacture nanostructures without destruction associated with static charge and

The book *Electrostatic Discharge: From Electrical Breakdown in Micro-gaps to Nanogenerators* opens with an introductory chapter. The first section of this book discusses the issue of ESD in advanced technologies. The second section follows with a chapter on electrical breakdown in micro-gaps. The third section contains a chapter on nanogenerators from ESD and a chapter on theoretical prediction and optimiza-

This book provides insight into the operation and design of micro-gaps and nanogenerators. It will be of use for engineers and scientists that have an interest in ESD

> **Dr. Steven H Voldman** Steven H Voldman LLC,

> > Lake Placid, New York, USA

ESD events.

physics and design.

tion of triboelectric nanogenerators.
