*Study on IoT and Big Data Analysis of 12" 7 nm Advanced Furnace Process Exhaust Gas Leakage DOI: http://dx.doi.org/10.5772/intechopen.92849*

The principle of measurement is the same as the principle of Extractive FTIR, but the closed cavity is changed to open type and integrated IoT mechanism to connect to the cloud, which is suitable for a variety of gaseous pollutants (including organic gases and inorganic gaseous pollutants) in the atmosphere are monitored (**Figure 9**). **Figure 10** shows the situation where this study was set on the site to set the exhaust line of the furnace control process.

#### **Figure 11.**

the gas in the pipeline; (2) By-products may cause corrosion or embrittlement of exhaust pipe materials; (3) If the type and concentration of by-products cannot be determined, appropriate exhaust gas treatment equipment may be selected; (4) damage may be caused to the currently used treatment equipment, which may affect treatment efficiency. Based on the aforementioned production management requirements, the 12″ furnace FTIR system installed by FAB includes (1) confirmation of the characteristics of hazardous process exhaust gas; (2) evaluation of the processing efficiency of various process exhaust gas treatment equipment; (3) investigation of hazardous sources. Condition assessment during machine maintenance and repair; (4) Confirm the concentration and source of harmful gases and

In this study, open-path FTIR was used to monitor the air quality of clean room to ensure the air quality of the working environment and the health of employees.

particulate matter in the clean room operating environment [26–28].

*Linked Open Data - Applications,Trends and Future Developments*

**Figure 9.**

**Figure 10.**

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*This study was set on the site to set the exhaust line of the furnace control process.*

*The FTIR field setting architecture.*

*The furnace process tools area measurement point distribution in this study.*


#### **Table 5.**

*The process parameters of the on-site process tools during our experiment.*


*Front and rear gas flow details of exhaust gas treatment equipment: N2-pump = 98 L/min; CDO-air = 89 L/min; CDO-N2 = 47 L/min; CDO outlet air = 57 L/min. \**

*TMB does not have FTIR standard spectrum.*

#### **Table 6.**

*The processing parameters of the on-site machine exhaust gas treatment equipment.*

This study set up two measuring points in the 12″ factory of Hsinchu Science Park in Taiwan, as shown in **Figure 11**. **Table 5** shows the process parameters of the on-site process tools during our experiment, and **Table 6** shows the processing parameters of the on-site machine exhaust gas treatment equipment. Among them, Inlet flow rate (Qi) estimated from the TEOS injection = 89 LPM, Initial outlet flow rate (Qo) estimated from the TEOS injection = 292 LPM. Therefore, dilution ratio = Qo/Qi = 292/89 = 3.3.

the main exhaust gas pipeline, the beginning of the reaction concentration between 0.08 0.1 ppm only. C2H4 is mainly used for cleaning the reaction chamber, concentration between 0.15 0.25 ppm. Therefore, when the main process is carried out, the high concentration of the input will be cleaned, so the high concentration state can be seen in the main exhaust pipe. On the other hand, the CO is active because it is in the process of production, so it is difficult to find the concentration of the main exhaust pipe. **Figures 13** and **14** are the results of the study after

*Study on IoT and Big Data Analysis of 12" 7 nm Advanced Furnace Process Exhaust Gas Leakage*

**Figure 15** shows secondary main exhaust pipe concentration trend. Due to the proximity of the process chamber, the concentrations are clearly detected, especially CO is more obvious, concentration between 1 1.7 ppm, and TEOS is liquid because it is normal and concentration between 0.4 0.6 ppm, so although the concentration near the reaction chamber is high, condensation occurs when entering the low temperature zone, so only this The section pipeline is measured, and the main exhaust pipe is not obvious. The C2H4 concentration is between 1.5 2.0 ppm.

*Achievement of the calculation of the concentration value distribution for one consecutive year (A point).*

optimizing the concentration values measured at the day of point A.

*DOI: http://dx.doi.org/10.5772/intechopen.92849*

**Figure 14.**

**Figure 15.**

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*Secondary main exhaust pipe concentration trend (B point).*
