**2. Methodology and study procedure**

#### **2.1 RFID and IoT technology**

equipment may be damaged, which may affect the processing efficiency [7–9]. As of 2020, there are already 37 semiconductor wafers FABs in Taiwan. Taking the 12-inch FAB as an example, there are about 420 various types of main process machines in a manufacturing plant with a monthly capacity of 50,000 wafers, of which about 63 are thin film process machines, photolithography process machine also has about 55,

Treat 100,000 pieces of factory space as a large factory, that is, all machines with similar functions are only divided into a group. The layout of the machine group is planned using a typical "non-shaped" pattern (please refer **Figure 2(b)**). A FAB is divided into several rectangular blocks, and each block is called a processing area (bay). Machines in the same machine group or machines with similar functions are placed on the same bay as the principle. The bay is located on the two sides of the FAB. In the center is the among-bay goods material handling system, which is responsible for the transportation between bay and bay. Within each bay, there is also a within-bay goods material handling system, which is responsible for the

However, due to the FAB12″ 7 nm stove based on the above production management requirements, the FTIR system was installed in this study, which includes (1) confirming the characteristics of harmful process exhaust gas; (2) evaluating the processing efficiency of various process equipment process exhaust; (3) Conduct a hazard exposure assessment survey during machine maintenance and repair; (4) Confirm the concentration and source of harmful gases and particles in the clean room operating environment; (5) Identify harmful substances in the pipeline. It is intelligent with the hardware system, and the IoT module is added to the original module. In this study, various process parameters and information required by FAB

summary of Taiwan IC manufacturing FABs show in **Table 2** [10].

*Linked Open Data - Applications,Trends and Future Developments*

machine and transport with the machine [11].

are continuously obtained in the 12″ stove [12, 13].

**Trade names 5″ FAB 6″ FAB 8″ FAB <sup>12</sup>″ FAB** AMPI — 1 — — Liteon — 1 — — EPISIL 1 2 — —

MOSEL — 1 — —

Maxchip — — 1 —

VISC — — 3 —

Total 1 9 19 17

Win Semiconductor

**Table 2.**

**82**

*Explanation: — means "none."*

*Summary of Taiwan IC manufacturing FABs.*

Micron ——— 3 (Taichung \* 1 + Hua Ya \* 2)

MXIC 2 — 1 1 1 (Hsinchu Science Park) NanYa — — 1 1 (Taishan Nanlin Park) PSC ——— 3 (Hsinchu Science Park)

UMC — 1 6 3 (Hsinchu Science Park)

TSMC — 1 7 5 (Hsinchu Science Park \*3 + Tainan Science Park\*2)

Winbond ——— 2 (Taichung Science Park +Tainan Science Park)

— 1 — —

The core of the FTIR is the Michealson interferometer. Its principle is that the two infrared beams after the infrared light source is split by the beam splitter are respectively directed to the fixed mirror and the moving mirror, and then combined into A single infrared ray, due to the difference in optical path formed by the moving mirror, makes the final combined infrared ray form an infrared beam of different energy due to destructive and constructive interference. It has a fast analysis speed, is not destructive to the sample, and can analyze solid liquid and gas samples, making it gradually become an indispensable qualitative tool for material analysis. In certain circumstances, it can even achieve the ability to quickly screen quantitative [17].

The instrument used in this study is aspirated FTIR. The pumped FTIR uses a pump to introduce the gas to be tested into the FTIR detection chamber for immediate analysis. The measurement method is shown in **Figure 3**. The main components of the pumped FTIR include infrared sources, interferometers, beam splitters, fixed mirrors, moving mirrors and gas chambers, detectors and electronic modules, etc. In addition, there must be a sampling tube and pump and other gas samples into the closed cavity In addition to the computer used for data collection and data analysis and appropriate software, this study also added an IoT module to the existing FTIR, allowing the FTIR to transmit and calculate. With the cloud, pumped FTIR's the instrument configuration is shown in **Figure 4** [18, 19]. For IoT part, this study starts with the sensor, imports the sensing signal into the electronic module, and exports the signal to the cloud system through the WiFi module, in this way, this study obtain FTIR sensing data 24 hr, and this system is set to obtain data once per second.

The basic design of the infrared spectrometer is to emit a beam of light to the measurement area and measure the amount of intensity change after the beam passes through the gas to be tested. Since each gas molecule has its specific infrared light absorption coefficient, when a light beam passes through the measurement region, a specific gas molecule absorbs light of a specific wavelength, so that the

**Figure 3.** *Schematic diagram of instrument configuration of gas-type FTIR spectrometer.*

can be calculated to know the composition and concentration of the gas. **Figure 5** shows the absorption spectrum of several gas molecules in the infrared range.

*Study on IoT and Big Data Analysis of 12" 7 nm Advanced Furnace Process Exhaust Gas Leakage*

This research is based on the fact that FTIR operates continuously for 24 hr and captures signals every second to obtain data throughout the year as a basis for big data. The main research significance is not to grasp the huge data information, but to professionally process these meaningful data, so that FAB factory managers can know whether the exhaust emissions meet the alert or warning potential under the sensing trend. Most of the research uses the big data platform for deployment, debugging and maintenance. This study is connected to the Chief Cloud eXchange (CCX) cloud database platform and the Spark big data platform. At the same time, these two platforms are also more suitable for primary systems to implement systems. **Figure 6** is the research cloud computing system and database architecture. For the big data of the chip process exhaust obtained by RFID, full consideration should be given to (1) big data life cycle, (2) big data technology ecology, (3) big data acquisition and preprocessing, (4) big data storage and management, (5) Big

The big data analysis method used in this study is described as follows. U is defined as the non-empty initial universe of the object. Then define E as a set of parameters related to the object in U. Let P (U) be the power set of U, and A ⊂ E. A pair (F, A) is called a soft set on U, where F is the mapping given by a F: A ! (U). In other words, the soft set on U is a parameterized family of Universe U subsets.

In addition, if the universe set U is a non-empty finite set, and σ is the equivalent relationship on U. Then (U, σ) is called approximate space. If X is a subset of U, then X can be written as a union of equivalent classes of U or not. If X can be written as a union of equivalent classes of U, then X is definable, otherwise it is undefinable. If X is undefinable, it can be approximated as two definable subsets, called the upper and lower approximation of X, as shown below Eq. (6) [22, 23].

*app X*ð Þ¼ <sup>∪</sup> ½ � *<sup>χ</sup> <sup>σ</sup>* : ½ � *<sup>χ</sup> <sup>σ</sup>* <sup>⊆</sup> *<sup>X</sup>* ,

*app X*ð Þ¼ <sup>∪</sup> ½ � *<sup>χ</sup> <sup>σ</sup>* : ½ � *<sup>χ</sup> <sup>σ</sup>* <sup>∩</sup>*<sup>X</sup>* 6¼ <sup>Ø</sup> *:* (6)

**2.2 Cloud system and big data analysis technology**

*DOI: http://dx.doi.org/10.5772/intechopen.92849*

data computing model and system.

**Figure 5.**

**85**

*The absorption spectrum of several gas molecules in the infrared range.*

**Figure 4.** *The instrument configuration of the pumped FTIR.*

intensity of the light beam in this wavelength band is weakened, and the ratio of light intensity before and after absorption is The concentration of the gas is directly related. The absorption band and intensity of the gas sample can be measured to know the composition and concentration contained in the gas. For a maximum path difference d adjacent wavelengths λ1 and λ2 will have n and (n + 1) cycles respectively in the interferogram. The corresponding frequencies are ν1 and ν2, and the membership function in the following Eqs. (1)�(5) [20, 21]:

$$\mathbf{d} = \mathbf{n}\lambda\_1 \mathbf{and} \,\mathbf{d} = (\mathbf{n} + \mathbf{1})\lambda\_2 \tag{1}$$

$$
\lambda\_1 = \mathbf{d}/\mathbf{n} \text{ and } \lambda\_2 = \mathbf{d}/(\mathbf{n}+\mathbf{1})\tag{2}
$$

$$\nu\_1 = \mathbf{1}/\lambda\_1 \mathbf{and} \ \nu\_2 = \mathbf{1}/\lambda\_2 \tag{3}$$

$$\nu\_1 = \mathbf{n}/\mathbf{d} \text{ and } \nu\_2 = (\mathbf{n} + \mathbf{1})/\mathbf{d} \tag{4}$$

$$
\nu\_2 - \nu\_1 = \mathbf{1/d} \tag{5}
$$

FTIR mainly emits a beam of light to the measurement area and measures the intensity change of the beam after passing the gas to be measured. Since each gas molecule has its specific infrared light absorption coefficient, when the light beam passes through the measurement area, the specific gas molecule will absorb light of a specific wavelength, so that the intensity of the light beam in this band is reduced, and the ratio of the light intensity before and after absorption The concentration of the gas is directly related, and the absorption band and intensity of the gas sample

can be calculated to know the composition and concentration of the gas. **Figure 5** shows the absorption spectrum of several gas molecules in the infrared range.
