**Abstract**

Recently, metal oxide gas sensors by nanostructures have stirred interest and have found their way in many applications due to their high sensitivity, material design compliance and high safety properties. Gas performance tests of n-type ZnO, Al-doped ZnO and ZnO/MWCNT structures toward different type gases from our previous studies have been reported. It is indicated that nanoparticle formations on the film surfaces, grain sizes, gas types and operating temperatures have a severe effect on the chemisorption/physisorption process. Low concentration detection, determination of grain size limit values and reducing operating temperature to room temperature are already obstacles on long-life sensitivity and long-term stability characters. Doping is an effective way to increase gas sensitivity with atomic surface arrangement and active gas adsorption sites, which are generated by doping atoms. However, C-based material/MO nanostructures are preferred than doped MO films with their working even at room temperature. Up to now, a lot of methods to improve the gas sensitivity has been proposed. With the help of the development of surface modification methods such as different types of doping and MO-C composite, sensitivity, which is the most important parameter of sensor performance, can also be stable as well as increasing later on.

**Keywords:** metal oxide, gas sensor, toxic gas, doping, multiwalled carbon nanotube
