**Author details**

Mostafa Barzegar Gerdroodbary Department of Mechanical Engineering, Babol Noshirvani University of Technology, Babol, Iran

\*Address all correspondence to: mbarzegarg@yahoo.com

© 2019 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/ by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

**33**

*Application of Knudsen Force for Development of Modern Micro Gas Sensors*

CO2 in low-pressure micro gas sensor. Fluid Dynamics. 2018;**53**(6):795-806

[10] Gerdroodbary MB, Ganji DD, Taeibi-Rahni M, Vakilipour S, Moradi R. Application of direct simulation Monte

Carlo for development of micro gas sensor. Bulgarian Chemical Communications. 2018;**50**(2):298-305

[11] Gerdroodbary MB, Ganji DD, Taeibi-Rahni M, Vakilipour S. Effect of Knudsen thermal force on the performance of low-pressure micro gas sensor. The European Physical Journal

[12] Gerdroodbary MB, Ganji DD, Taeibi-Rahni M, Vakilipour S. Effect of geometrical parameters on radiometric force in low-pressure MEMS gas actuator. Microsystem Technologies.

Anazadehsayed A, Hassanvand A, Moradi R. Calibration of low-pressure MEMS gas sensor for detection of hydrogen gas. International Journal of Hydrogen Energy. 2018;**43**(11):5770-5782

[14] Gerdroodbary MB, Mosavat M, Ganji DD, Taeibi-Rahni M, Moradi R. Application of molecular force for mass analysis of krypton/xenon mixture in low-pressure MEMS gas sensor.

[15] Gerdroodbary MB, Ganji DD, Shiryanpour I, Moradi R. Mass analysis

[16] Hassanvand A, Gerdroodbary MB, Moradi R, Amini Y. Application of Knudsen thermal force for detection of inert gases. Results in Physics.

of CH4/SO2 gas mixture by lowpressure MEMS gas sensor. Journal of Natural Gas Science and Engineering.

Vacuum. 2018;**150**:207-215

2018;**53**:317-328

2018;**9**:351-358

Plus. 2017;**132**(7):315

2018;**24**(5):2189-2198

[13] Gerdroodbary MB,

*DOI: http://dx.doi.org/10.5772/intechopen.86807*

[1] Wu CH, Kang D, Chen PH, Tai YC. MEMS thermal flow sensors. Sensors and Actuators A: Physical.

[2] Vigne S, Alava T, Videlier H, Mahieu R, Tassetti CM, Duraffourg L, et al. Gas analysis using a MEMS linear time-of-flight mass spectrometer. International Journal of Mass Spectrometry. 2017;**422**:170-176

[3] Mirzaei M, Poozesh A. Simulation of fluid flow in a body-fitted grid system using the lattice Boltzmann method. Physical Review E. 2013;**87**(6):063312

[4] Verma VK, Yadava RD. Stochastic resonance in MEMS capacitive sensors. Sensors and Actuators B: Chemical.

[5] Grzebyk T, Górecka-Drzazga A. MEMS type ionization vacuum sensor. Sensors and Actuators A: Physical.

[6] Gerdroodbary MB, Ganji DD, Taeibi-Rahni M, Pruiti B, Moradi R. Development of Knudsen thermal force for mass analysis of CH4/He gas mixture. International Journal of Modern Physics C. 2019;**30**(01):1-16

[7] Sarabi S, Bogy DB. Effect of functional end-groups on lubricant reflow in heat-assisted magnetic recording (hamr). Tribology Letters.

Gerdroodbary M, Mosavat M, Ganji DD. Detection of ammonia gas by Knudsen thermal force in micro gas actuator. Case Studies in Thermal Engineering.

[9] Barzegar Gerdroodbary M, Ganji DD, Moradi R, Abdollahi A. Application of Knudsen thermal force for detection of

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*Application of Knudsen Force for Development of Modern Micro Gas Sensors DOI: http://dx.doi.org/10.5772/intechopen.86807*
