**MICROMACHINING TECHNIQUES FOR FABRICATION OF MICRO AND NANO STRUCTURES**

Edited by **Mojtaba Kahrizi**

**INTECHOPEN.COM**

http://dx.doi.org/10.5772/1364 Edited by Mojtaba Kahrizi

#### **Contributors**

Sang Jae Kim, Gunasekaran Venugopal, Shrikant Saini, H.-T. (Peter) Liu, Ernst Schubert, Tai Chen, Bruce Darling, Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca, Edgar Norman Vázquez-Acosta, José Luis González-Vidal, José Antonio Moreno-Cadenas, Hongmin Lee, Anjali Vishwas Kulkarni, Xianghua Wang, Hoi Wai Choi, Giuseppe Yickhong Mak, Fei Xu, Jun-Long Kou, Yan-Qing Lu, Wei Hu, Paddy French, Idris Ali, Shefiu S. Zakariyah, Thomas Gietzelt, Mohammad Yeakub Ali, Ahsan Khan, Reyad Mehfuz, Ahmad Faris Ismail

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First published in Croatia, 2012 by INTECH d.o.o. eBook (PDF) Published by IN TECH d.o.o. Place and year of publication of eBook (PDF): Rijeka, 2019. IntechOpen is the global imprint of IN TECH d.o.o. Printed in Croatia

Legal deposit, Croatia: National and University Library in Zagreb

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Micromachining Techniques for Fabrication of Micro and Nano Structures Edited by Mojtaba Kahrizi p. cm. ISBN 978-953-307-906-6 eBook (PDF) ISBN 978-953-51-6095-3
