**6. Conclusions**

476 Microelectromechanical Systems and Devices

Fig. 18. Florescence microscopic image of cell attachment in platinum (first column), silicon (second column) and UNCD (third column) surfaces, ([81], permission to reprint obtained

Fig. 19. Scanning Electron Microscope image of cell attachment on platinum (first column), Silicon (second column) and UNCD (third column) surfaces, ([81], permission to reprint

from Springer).

obtained from Springer).

In this chapter, we have described mainly the characterization technique of diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) thin films and their application in MEMS devices. From HRTEM, FTIR, Raman Spectroscopy analysis, we conclude that the hydrocarbon groups are bonded with two interpenetrating networks (a-C:H and a-Si:O) of DLN films. And also from HRTEM analysis, DLN films contain Si3N4, SiC and SiOx nanoparticles within amorphous matrix, which help to reduce the compressive stress of the films. Raman Spectroscopy shows that the DLN films should have higher concentrations of sp3 carbon than the conventional DLC films. High sp3 contents influence the mechanical properties of the films as a result, hardness and elastic modulus will increase due to higher sp3 content. From our all characterize technique we can conclude that diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) thin films have very high hardness, high modulus of elasticity, high tensile strength, high thermal conductivity, very less surface roughness, low coefficient of friction low thermal expansion and good wear properties. All of these properties are unique material properties for application in MEMS/NEMS device. The excellent tribological properties of the diamond films are very useful to improve the stiction, friction and wear resistance of MEMS/NEMS based microcomponent. The chemical inertness and high temperature withstanding capability of this films can be useful for biosensor and microfluidic devices. In our microfabrocation part we discussed different thin film deposition technique with different pattern like lift-off, electroplating, thin film etching and substrate etching technique. Finally we have discussed the diamond film patterning and their application in

Diamond, Diamond-Like Carbon (DLC)

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MEMS/NEMS technologies like pressure sensor, accelerometer and different actuators. As a biocompatible material, diamond films have lot of applications in biomedical purpose such as orthopedic, cardiovascular, contact lenses, catheter, prosthetic replacement etc. Also the UNCD films have much more cells attachment, cell spreading and nuclear coverage area compared to another materials. Which confirms the biocompatibility issue of UNCD materilas. The chemical inertness, biocompatibility and excellent thermal conductivity of diamond, DLC and DLN films can be exploited in the development of biosensors, microfluidic device for lab-on-a-chip and implantable medical devices applications.
