**1. Introduction**

368 Microelectromechanical Systems and Devices

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After the development of cathode ray tube (CRT) in the 19th century and the commercialization of television (TV) in the 1930s display devices are always one of the dream products in daily life. The revolutionary innovation from black-and-white to color display, from small size to large area, from curved surface to flat panel, and from spaceconsuming tube to short tube, all proved that the demands and distribution of display device was growing and played a critical role on civilization and industrialization.

Along the popularization of personal computer, the demand of CRT put the display technology and its industry to a highly growth field for the past few decades until the late 20th century. On the other hand, with the leaping progress of research and development on liquid crystal, liquid crystal display (LCD) also attracted customers' attention and overwhelmingly replaced CRT and suppressed CRT industry because of its light weight and thin body. Even though LCD's starting price was high, most of customers were still switching their display device from CRT since the bulky CRTs cost more when talking about office or house rent. Similarly to CRT, researchers also spent time developing thinner, lighter, wider viewing angle, shorter response time, and larger size LCDs. As a result, LCD became a main stream not only for computer displays, but also for recreation displays such as TV. In the same time, plasma display panel (PDP), and organic light emitting diode (OLED) also found their application fields as a flat panel display device to replace the role of CRT. Unfortunately, PDP's high resolution and fast response time come with low life time and high power dissipation. The original advantage of large size display was also gradually replaced by the up-to-date LCD produced from the 6th-8th generation glass substrate. Thus PDP market is now suppressed by LCD and PDP manufacturers are also reducing their production. Although OLED was proved to be display-capable, recently commercialized OLED's blue color degradation still limits its application on information display. Since the demand for larger display size, wider viewing angle, and smaller body size are still growing, projection display such as back projection TVs and overhead projectors are built in parallel. Back projection TV, owing to its bulky size and low resolution, had limited applications and disappeared from market rapidly; overhead projectors, even though still find their way in the early 21th century, it was neither portable nor long lasting. Thus, how to realize a light weight, small size, and large display area comes to one end – flexible display. When display device becomes flexible, it must be light weight and portable. It must

Possibilities for Flexible MEMS:Take Display Systems as Examples 371

Electrophoretic system inherited some basic concepts from Gyricon. As depicted in Figure 2, electrophoretic system further reduced the beads' sizes and increased their density. The main difference between electrophoretic beads and Gyricon beads is there's only one color on one electrophoretic bead. This change makes electrophoretic system possible to show higher resolution and contrast. Furthermore, since beads' sizes (approximately 1m) are smaller than Gyricon's, gray scale display can be divided into finer details. Similar to Gyricon, an outside electric field plays the critical role on controlling the charged beads' movement in a liquid environment. But different from Gyricon, where beads have to rotate inside the liquid and stabilize after long time; the electrophoretic beads don't have to wait for stabilization since the beads are with only one color. This makes the electrophoretic system response faster than Gyricon. Likewise, electrophoretic system does not require any maintenance voltage after operation. Some main advantages and disadvantages of

Disadvantage

1. Coarse resolution, 2. Slow response time, 3. No full color, 4. Impure color,

5. High operation voltage.

**1.1.2 Electrophoretic display** 

electrophoretic system are listed below:

3. More gray scale options, 4. Capable for mass production,

2. Too high operation voltage.

Fig. 2. Concept of electrophoretic system.

1. Finer resolution (compared to Gyricon), 2. Faster response time (compared to Gyricon),

1. Still slow response time (for human perception),

Advantage

Disadvantage

Fig. 1. Schematic cross-sectional view of Gyricon system.

also be with compact size when folded or rolled, and must be supporting large area when unfolded or unrolled. Hence the first idea within its applications is focused on electronic paper (e-paper). With the arising of the attitude towards ecological friendliness, the demands of paper reduction also transfer to and stress on the development of flexible display as an e-paper. A successfully flexible display is thus expected to be bendable, portable, light weigh, low cost, durable, and even disposable. On the other hand, from the technology point of view, to manufacture a flexible display typically requires a flexible substrate such as polymer plastic material, which adds more complicated factors into traditional electronic device's production line.

From the process flow we understand that there are several disadvantages when use polymer plastic material as flexible substrate. For example, high temperature thin film deposition will cause material deformation since most polymers' glass transition temperatures (*Tg*); points or even melting point are below 200°C. Some polymer materials are also weak to chemical treatment or plasma bombardment which usually carries ultraviolet (UV) light. Thus, in order to successfully handle flexible substrate during production, a new process system should be set up. This process system is expected to take advantage of substrate's flexibility for variety and to avoid previously mentioned drawbacks on polymer materials. As discussed before, the flexible display has to support large display area thus a large substrate also introduces process difficulties in a production line. Take current semiconductor apparatus as an example, up to 12-inch circular substrate can be supported with lowest unit cost. However, a 12-inch diameter area cannot be called large area display. The latest 8th generation LCD apparatus which supports up to 2160×2460mm substrate size will be very helpful for large area display but its transportation is always a problem. To overcome these issues, traditional printing processes are taken into consideration because flexible polymer substrate is just like paper, which can be bent during process and can be produced continuously. Both the material flexibility and process continuity are positive factors for large area device realization.

### **1.1 Flexible display systems**
