**6. Summary**

The flexible MEMS by roll-to-roll printing system is an epoch-making concept that the system require neither solid substrate nor photolithography process.

A complex model which is a superposition of a single-end fixed cantilever and a parallel plate was proposed and proved by simulation and experiments. The model clearly indicated key parameters which play crucial roles on operation voltage which is also a key for portable, light weight, low cost, and maybe disaposable appliation. The Fabry-Perot color interferometer concept was taken as a demonstrator which was controlled by the MEMS. With this complex model, similar MEMS device can easily achieve low operation voltage which is a must for commercialization and safety concern.

The roll-to-roll process system showed a budget-friendly, high-efficiency, and large area supportive production and suggested high potential on replacing current photolithography technique for flexible applications.

With the successful electrical, mechanical, and optical demonstration, the large area flexible MEMS as well as the roll-to-roll printing process system opened great applications on portable and disposable electronic devices thus provided significant values in design and production fields.
