**Meet the editor**

Dr. Nazmul Islam is a faculty in the Engineering department at the University of Texas at Brownsville. He also has served as an assistant professor in the Electrical Engineering at Northern Arizona University. He received his Ph.D. in Electrical Engineering from the University of Tennessee, Knoxville. He worked as a post-doctoral research associate in biomedical engineering department

at the University of Tennessee. Dr. Islam finished his M.Sc in Electrical Engineering from Virginia Tech in 2002. He worked at the Oak Ridge National Lab, Oak Ridge, TN, as research associate. Dr. Islam is leading the research efforts of MEMS/NEMS Research Group at the University of Texas at Brownsville. His current research concentrates in the areas of Micro/Nano-fluidics, Bio-sensors and MEMS/NEMS devices. He organizes numerous symposiums, sessions at ASME conferences. Dr. Islam is the recipient of Olegario Vazquez Rana Faculty Fellow Award, FY 2008-10, 2011-12 at the University of Texas. He is also the recipient of NSF-NUE, SFAz, AWI research award.

Contents

**Preface IX** 

**Part 1 BioMEMS Devices 1** 

Chapter 2 **MEMS-Based Microdevice** 

Chapter 1 **Implantable Parylene MEMS RF** 

**Coil for Epiretinal Prostheses 3** 

Nazmul Islam and Saief Sayed

Chapter 4 **Acoustic Wave Based MEMS Devices,** 

Chapter 5 **MEMS Characterization Based** 

Wen Li, Damien C. Rodger, James D. Weiland, Mark S. Humayun, Wentai Liu and Yu-Chong Tai

Chapter 3 **MEMS Microfluidics for Lab-on-a-Chip Applications 39** 

**for Cell Lysis and DNA Extraction 23**  Xing Chen, Dafu Cui, Haoyuan Cai, Hui Li, Jianhai Sun and Lulu Zhang

**Development and Applications 65**  Ioana Voiculescu and Anis N. Nordin

**on Optical Measuring Methods 89**  Tong Guo, Long Ma and Yan Bian

Chapter 6 **Surface Characterization and Interfacial Adhesion in MEMS Devices 109** 

Y. F. Peng and Y. B. Guo

Bin Tang and Kazuo Sato

Anatoly Petrenko

Chapter 8 **Macromodels of** 

**Part 2 MEMS Characterization and Micromachining 87** 

Chapter 7 **Advanced Surfactant-Modified Wet Anisotropic Etching 131** 

**Micro-Electro-Mechanical Systems (MEMS) 155** 
