**MICROELECTROMECHANICAL SYSTEMS AND DEVICES**

Edited by **Nazmul Islam** 

http://dx.doi.org/10.5772/1363 Edited by Nazmul Islam

#### **Contributors**

Cheng-Yao Lo, Anatoly Ivanovich Petrenko, Bin Tang, Kazuo Sato, Javier Perez De La Cruz, Yunfeng Peng, Yinbiao Guo, Tong Guo, Wibool Piyawattanametha, Leslie Phinney, Michael Baker, Justin Serrano, Ioana Voiculescu, Anis Nurashikin Nordin, Romolo Marcelli, Daniele Comastri, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti, Giancarlo Bartolucci, Hamood Ur Rahman, Hamid Jahed, Wen Li, Damien C. Rodger, James Weiland, Mark Humayun, Yu-Chong Tai, Tarun Kumar Barik, Tarun Bhattacharyya, Tuhin Subhra Santra, Prateek Patel, Xing Chen, Dafu Cui, Haoyuan Cai, Hui Li, Jianhai Sun, Lulu Zhang, Nazmul Islam, Saief Sayed

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First published in Croatia, 2012 by INTECH d.o.o. eBook (PDF) Published by IN TECH d.o.o. Place and year of publication of eBook (PDF): Rijeka, 2019. IntechOpen is the global imprint of IN TECH d.o.o. Printed in Croatia

Legal deposit, Croatia: National and University Library in Zagreb

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Microelectromechanical Systems and Devices Edited by Nazmul Islam p. cm. ISBN 978-953-51-0306-6 eBook (PDF) ISBN 978-953-51-6178-3
