**6. Acknowledgement**

The authors greatly acknowledge the financial support from the National Science Foundation of China under Grant number 60701019, 60427001 and 60501020. The authors are grateful to Mr. Feng Shen of Institute of Mechanics, Chinese Academy of Sciences for his assistance.

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**3** 

*USA* 

**MEMS Microfluidics for** 

Nazmul Islam and Saief Sayed

**Lab-on-a-Chip Applications** 

*MEMS/NEMS Lab, The University of Texas at Brownsville* 

Micro-/Nano- fluid devices are becoming more prevalent, both in commercial applications and in scientific inquiry. Microfluidics, a branch of MEMS (Micro-Electro-Mechanical Systems) is key enabling factor in the miniaturization and integration of multiple functionalities for chemical analysis and synthesis in handheld microdevices, which require efficient methods for manipulating ultra small volumes of liquid as well as the contents in the fluid within the fluid networks. For biomedical applications, microfluidic chip arrays are being used to identify multiple bioparticles [1]. Recent developments in micro-fabrication technologies enabled different types of microfluidic functions such as micro-pumps [2, 3], micro-mixers [4], particle concentrator [5, 6], and various s types of injection systems (nanoneedles). At the very beginning of microfluidics, people thought that microfluidic devices could just be a miniaturized version of macro- fluidic devices. The technological advancement on microfluidic systems has proven that the problem is far more complicated than scaling down a device geometrically. Therefore, a better understanding of the

A dominant difference of microfluidic devices from their macro-scale counterparts is the increased surface/volume ratio, hence dominant surface force effects/friction. Micro channel needs high pressure for pressure driven flow to produce sufficient flow rate. The formula below relates the applied pressure with the conduit radius for a constant flow rate.

Every time we try to reduce the conduit radius into half, we need to have sixteen times of larger pressure to sustain the same flow rate. So at microscale, surface forces start to dominate due to the large surface/volume ratio. Therefore electroosmosis (as a type of surface forces) becomes the prime candidates for fluidic manipulation at micro scale. Direct Current Electroosmosis (DCEO) has a long history of being applied in miniaturized biochemical devices. However, DCEO has many undesirable effects, such as high voltage operation, electrolysis and resulting bubble generation, and pH gradient. In this chapter, we examined a new type of EO phenomena, ACEO (Alternating Current Electroosmosis), and

: viscosity; *a* : conduit radius

how it can be employed to integrate with the microcantilever particle trapping.

**1. Introduction** 

micro/nano scale properties is in order.

4

8 *a LQ <sup>P</sup>* 

