**Abstract**

During the gas ignition process, the plasma and the microwave electric fields are evolved with time together in the plasma volume. The spatio-temporal evolution pattern of microwave-radiated plasma parameters is reported here, highlighting the role of these electric fields on power coupling processes. Evolutions of electric field and so power coupling processes are calculated using the finite element method (FEM). It is observed that the main power coupling mechanism is electron cyclotron resonance (ECR) method; however, with the evolution of plasma, the mode shifts from ECR to off-ECR-type heating with time. Off-ECR heating in the form of upper hybrid resonance (UHR) method, electrostatic (ES) ion acoustic wave heating method is important heating mechanisms during highly dense plasma condition, when density is above critical density for launched frequency, 2.45 GHz. The conclusions on the shifting of heating mechanisms are also drawn based on the 3D maps of spatio-temporal plasma density and hot electron temperature evolution.

**Keywords:** microwave plasma simulation, COMSOL multi-physics, magnetized plasma evolution, ECR, off-resonance, ion source, electrostatic heating, electric field evolution, hot electron temperature, experimental validation
