**5. Influence for input data of argon abnormal glow discharge**

In this part, we will show the properties of the argon plasma discharge in the case of entering data computed by BOLSIG+ software [46]. We remind that the preceding results are obtained with enter data computed by multiterm estimation of the Boltzmann equation. We remind again that the preceding results are identical when are calculated exclusive of the rate coefficients *K<sup>o</sup> <sup>m</sup>* and *Kio <sup>m</sup>*. The exclusion is the metastable atom concentration, which is prejudiced by these coefficients, i.e., the stepwise ionization processes is insignificant, evaluated to the both ionization of the chemo-ionization and ground state atoms processes. Consequentially, we can calculate the properties of the argon abnormal glow discharge exclusive of *K<sup>o</sup> <sup>m</sup>* and *Kio <sup>m</sup>* coefficients. The secondary electron emission coefficient is 0*:*06. The applied voltage at the cathode is 250 V. The gas pressure is 133*:*32 Pa.

**Figure 5** shows the particle density distributions (**Figure 5(a)**), metastable atom concentration (**Figure 5(b)**) and mean electron energy (**Figure 5(c)**) in the stationary state. When we compare between the results given by **Figures 4** and **5**, we conclude clearly the influence of entering data of BOLSIG+ on the characteristics of the argon abnormal glow discharge. In exacting the cathodic region illustrated in the **Figure 4(a)** is totally dissimilar to the cathodic region illustrated in the **Figure 5(a)**. We remind that the similar discharge circumstances (voltage, pressure, etc.) are used in two and multi terms approximations. But, the results are actually dissimilar.

**Table 3** gives the main dissimilarity between entering both data of multiterm approximation and of BOLSIG+.

**Figure 4.**

**83**

*Comparison between our results and those given by Becker et al.: (a) densities, (b) electric potential and electric field, (c) metastable atom density, and (d) mean electron energy in the stationary state in Argon gas.*

*Calculation of the Metastable Atom Densities in Argon and Neon Abnormal Glow Discharges*

*DOI: http://dx.doi.org/10.5772/intechopen.84293*

*Calculation of the Metastable Atom Densities in Argon and Neon Abnormal Glow Discharges DOI: http://dx.doi.org/10.5772/intechopen.84293*

#### **Figure 4.**

*Comparison between our results and those given by Becker et al.: (a) densities, (b) electric potential and electric field, (c) metastable atom density, and (d) mean electron energy in the stationary state in Argon gas.*

the current densities are 0*:*137, 0*:*508 and 0*:*843 mA/cm<sup>2</sup> related to the pressures of

*Solid State Physics - Metastable, Spintronics Materials and Mechanics of Deformable…*

**Figure 3** represents the current-voltage properties in the stationary state. The results attained beginning of the database of BMA evaluated to those obtained by experimental method [43, 44]. We find that the results get beginning of the database of the BMA are in excellent conformity judgment against to those experimental

**Figure 4** demonstrates the comparison amidst in our results and those given by Becker et al. [30] (**Figure 4(a)**) ion and electron concentrations, (**Figure 4(b)**) electric field and electric potential, (**Figure 4(c)**) metastable atom concentration and (**Figure 4(d)**) mean electron energy. This figure substantiates the validity of our 1D code. The main dissimilarity amidst in those given by Becker et al. and our

We find that the similar discharge has been studied by Fiala et al. [45], where the hybrid model has been employed in two dimensional configurations. We find that the results got by Fiala et al., it was approximately indistinguishable to our results. In exacting, the maximum of particle concentrations is 1.1 <sup>10</sup><sup>9</sup> cm<sup>3</sup> and the electric field at the cathode is 675 V/cm for applying voltage that is equal to 126.3 V. Consequently, the hybrid model is equivalent to our fluid model in the presence of the metastable atom concentrations of these discharge circumstances. Besides our model identifier both properties of the discharge, the mean electron energy and the

**5. Influence for input data of argon abnormal glow discharge**

when are calculated exclusive of the rate coefficients *K<sup>o</sup>*

voltage at the cathode is 250 V. The gas pressure is 133*:*32 Pa.

In this part, we will show the properties of the argon plasma discharge in the case of entering data computed by BOLSIG+ software [46]. We remind that the preceding results are obtained with enter data computed by multiterm estimation of the Boltzmann equation. We remind again that the preceding results are identical

the metastable atom concentration, which is prejudiced by these coefficients, i.e., the stepwise ionization processes is insignificant, evaluated to the both ionization of the chemo-ionization and ground state atoms processes. Consequentially, we can calculate the properties of the argon abnormal glow discharge exclusive of *K<sup>o</sup>*

*<sup>m</sup>* coefficients. The secondary electron emission coefficient is 0*:*06. The applied

**Figure 5** shows the particle density distributions (**Figure 5(a)**), metastable atom concentration (**Figure 5(b)**) and mean electron energy (**Figure 5(c)**) in the stationary state. When we compare between the results given by **Figures 4** and **5**, we conclude clearly the influence of entering data of BOLSIG+ on the characteristics of the argon abnormal glow discharge. In exacting the cathodic region illustrated in the **Figure 4(a)** is totally dissimilar to the cathodic region illustrated in the **Figure 5(a)**. We remind that the similar discharge circumstances (voltage, pressure, etc.) are used in two and multi terms approximations. But, the results are actually dissimilar. **Table 3** gives the main dissimilarity between entering both data of multiterm

*<sup>m</sup>* and *Kio*

*<sup>m</sup>*. The exclusion is

*<sup>m</sup>* and

133*:*32, 250*:*32 and 330*:*32 Pa, in that order.

results [43, 44].

**4. Validity of the model**

results are pointing up in the **Table 2**.

metastable atom concentrations.

approximation and of BOLSIG+.

*Kio*

**82**


#### **Table 2.**

*The major differences between our results and those given by Becker et al.*

**Figure 6** shows the comparison amidst of the experimental results [47, 48] and our results got beginning database of BOLSIG+ code for pd = 2 Torr cm. We remind that the experimental results [47, 48] are given for the diameter of the electrode equal to 8 cm and the inter-electrodes spacing equal to 1 cm. We remind again that the results obtained by Ref. [47] its approximately dissimilar to the results obtained by Ref. [48] due to the experimental circumstances of the secondary electron emission coefficient. We remark that our results got from database of BOLSIG+ code are in excellent accord with the experimental results [47].
