**Author details**

that the most of the mean electron energy is 46*:*30 eV in the cathodic region. As a consequence, the fluid model by injecting the metastable atom concentrations is extremely important for investigating the abnormal glow discharge properties of

*Solid State Physics - Metastable, Spintronics Materials and Mechanics of Deformable…*

In order to study the effect of metastable atom density, a second order fluid electric model has been used in the case of a DC low-pressure Ar and Ne abnormal glow discharges. The Poisson equation for the potential and electric field is joined to the first three moments of the Boltzmann's conservation equations ignoring inertia of the charged particles. In the framework of the local energy approximation, the basic data employed in this chapter are calculated by Becker et al. in the case of multiterm estimation of Boltzmann equation (BMA) [30] and from BOLSIG+ software. The task of metastable atom concentration in the discharge is obvious for study into side of plasma glow discharge for several pure gases and mixed gas. We note that the abnormal glow discharge is sustained by secondary electron emission coefficient and the existence of the metastable atom concentration in this particular

The drift velocity of positive ion neon gas is: *w*<sup>þ</sup> ¼ ð Þ 11*:*27*E=n =*

�<sup>1</sup> for T = 310 K [56]

gas is equal to 14*:*73 s [53]. The diffusion coefficient of metastable atoms is

Ionization energy of neon gas is equal to 21*:*56454 eV. The energy loss (Pec) per electron due to elastic collision of electrons with the background gas is calculated according to [31, 55]. The rate coefficient of chemo-ionization processes is

The authors express their gratitude to Markus M Becker (Greifswald-Germany)

<sup>0</sup>*:*<sup>5</sup> (m/s) [52] where E/N is in Td. The metastable lifetime of neon

�<sup>1</sup> Torr [54]. The energy loss of an excited atom is 16.6 eV. The

several pure gases and mixed gas.

**7. Conclusion**

discharge.

**A. Appendix A**

ð Þ 1 þ 0*:*01288*E=n*

*Dm* <sup>¼</sup> 150 cm<sup>2</sup> <sup>s</sup>

*Kci* <sup>¼</sup> <sup>3</sup>*:*<sup>6</sup> � <sup>10</sup>�<sup>10</sup> cm<sup>3</sup> <sup>s</sup>

**Acknowledgements**

for helpful discussions.

**88**

Abdelaziz Bouchikhi Faculty of Technology, Department of Electrical Engineering, University of Saïda, Saïda, Algeria

\*Address all correspondence to: bouchikhiabdelaziz1@yahoo.fr

© 2019 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/ by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
