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• Let Ns,i be the density of a species i reaching the surface and Nv,i the density of same species i in volume. The ratios Ns,i/Nv,i are too small (Table 4); the

Type H2 SiH4 H SiH3 SiH2 Ns,i/Ns, H2 1 0.23 1.67 10�<sup>4</sup> 8.60 10�<sup>5</sup> 9.86 10�<sup>6</sup>

Theory, Application, and Implementation of Monte Carlo Method in Science and Technology

Type SiH4 SiH3 SiH2 v, j 6.695 10�<sup>6</sup> 7.965 10�<sup>6</sup> 775 10�<sup>6</sup>

• The reactions begin with the dissociation (consumption) of H2 and SiH4 by R5,

• The production of SiH3 is done by R8, and then there is production of SiH2 by

• The reaction R2: SiH4 + e ! SiH2 + 2H + e plays the central role in SiH4 dissociation by electron impact [24]. This result is compatible with [39].

• The second important chemical reaction in the SiH4 dissociation is R1:

SiH4 + e ! SiH3 + H + e [24]. This result is compatible with that of Perkins

MCS is a widely used method in statistical physics to study thermodynamic, structural, or phase properties. It is based on random and probabilistic processes. The purpose of this chapter is to present the technique for general use in physics for the study of thin film deposition problems. The technique can be generalized to other fields of science: biology, economics, transportation, and social sciences. We started by presenting general rules for numerical simulation methods. Metropolis algorithm has been considered as the basic algorithm. After, we presented the different steps for the realization of a MCS code. We chose the particle-particle model MCS (PP-MCS) to explain the different steps and procedures to be applied in the deposition of thin layers by PECVD processes. We have shown that this technique can be generalized to the particle-in-cell MCS (PIC-MCS) case or kinetic MCS (kMCS), as it can be joined with other modules to give hybrid models. It is important to know how to choose random configurations from the laws

A numerical application is presented for collisions in a SiH4/H2 gas mixture in the PECVD process. A preliminary work of determination of the chemical reactions between molecules and radicals is made. A choice of the simulation cell is made, and the definition of the probabilities of the collisions between peers is made. The Metropolis algorithm makes it possible to follow the various elastic and inelastic

surface effect is negligible.

Ratios Ns,i/Ns, H2 of particles reaching the surface compared to H2.

Ratios Ns,i/Nv,i of particles reaching the surface compared to volume.

et al. [51] and that of Doyle et al. [52].

or probability distributions in the system.

R1, and R2 reactions.

R12.

Table 3.

Table 4.

6. Conclusions

132

Fethi Khelfaoui\* and Oumelkheir Babahani Physics Department, RPPS Laboratory, Faculty of Mathematics and Matter Sciences, Kasdi Merbah Ouargla University, Algeria

\*Address all correspondence to: fethi.khelfaoui@gmail.com; khelfaoui.fe@univ-ouargla.dz

© 2019 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/ by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
