6. Conclusions

MCS is a widely used method in statistical physics to study thermodynamic, structural, or phase properties. It is based on random and probabilistic processes. The purpose of this chapter is to present the technique for general use in physics for the study of thin film deposition problems. The technique can be generalized to other fields of science: biology, economics, transportation, and social sciences.

We started by presenting general rules for numerical simulation methods. Metropolis algorithm has been considered as the basic algorithm. After, we presented the different steps for the realization of a MCS code. We chose the particle-particle model MCS (PP-MCS) to explain the different steps and procedures to be applied in the deposition of thin layers by PECVD processes. We have shown that this technique can be generalized to the particle-in-cell MCS (PIC-MCS) case or kinetic MCS (kMCS), as it can be joined with other modules to give hybrid models. It is important to know how to choose random configurations from the laws or probability distributions in the system.

A numerical application is presented for collisions in a SiH4/H2 gas mixture in the PECVD process. A preliminary work of determination of the chemical reactions between molecules and radicals is made. A choice of the simulation cell is made, and the definition of the probabilities of the collisions between peers is made. The Metropolis algorithm makes it possible to follow the various elastic and inelastic

How to Use the Monte Carlo Simulation Technique? Application: A Study of the Gas Phase… DOI: http://dx.doi.org/10.5772/intechopen.88559

collisions; it also makes it possible to make the statistics of the interactions with the surface. The results are compatible with [39, 51, 52].

Other questions may be asked to account for molecular ions, surface and volume kinetics, or thin film formation. The techniques and different models of the MCS (PP-MCS, MCS-PIC, kMCS) allow taking care of these questions.

The interconnection of the MCS with other models (MDS, hybrid model, fluid model, electromagnetic model, etc.) would allow answering more questions. The methods can be applied to other specialties than the physical sciences.
