**Author details**

Wu Zhou<sup>1</sup> \*, Jiangbo He<sup>2</sup> , Peng Peng<sup>3</sup> , Lili Chen<sup>3</sup> and Kaicong Cao<sup>1</sup>

1 School of Mechanical and Electrical Engineering, University of Electronic Science and Technology of China, Chengdu, China

2 School of Mechanical Engineering, Xihua University, Chengdu, China

3 School of Mechanical Engineering, Chengdu Technological University, Chengdu, China

\*Address all correspondence to: zhouwu916@uestc.edu.cn

© 2020 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/ by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

*Reliability of Microelectromechanical Systems Devices DOI: http://dx.doi.org/10.5772/intechopen.86754*
