*Reliability of Microelectromechanical Systems Devices DOI: http://dx.doi.org/10.5772/intechopen.86754*

element analysis or other analytical methods. The imperfection is also important for the MEMS sensors employing the differential detecting principle. If the imperfection is not considered, the impact of the variation of dimension and stress is operating in common mode. As such, these variations cannot induce the variation of the bias for the MEMS sensors employing the differential detecting principle.

3. Discussion on the factors affecting the thermal drift and how to suppress the thermal drift

Based on the variation of dimension, stress, or material property induced by temperature, the thermal drift can be acquired by deriving the differential of the temperature. Then, the factors affecting thermal drift and how to suppress this will be discussed.
