**3.5 Carbon 1S emission**

The emission of the C1 s confirms that the attachment via the chlorination/alkylation gives either chemical or physical bonds. Before grafting, or in the case of physical bonding, no Si▬C should be available. However, in the case of chemical bond, the Si▬C should be observed in the C1 s emission. For example, **Figure 12** depicts the C1 s emission of the CH3-terminated Si NWs. Before termination, no Si▬C bond was found. In this case only two emissions observed: C▬C at 285.20 ± 0.02 eV and C▬O at

**Figure 9.**

*Scheme of the suggested mechanism for low-temperature oxidation of the H-terminated Si NW.*

**Figure 10.**

*Scheme of the suggested mechanism for high-temperature oxidation of the H-terminated Si NW.*
