Meet the editors

Zdravko I. Stanimirović has been active in research and development work for the last 24 years. He received his M.S. and Ph.D. degrees in electrical engineering from the Faculty of Electrical Engineering, University of Belgrade, the Republic of Serbia in 1999 and 2007, respectively. Dr. Z. Stanimirović is currently an associate research professor at the Telecommunications and Electronics Institute IRITEL A.D. Beograd. Over the years he partic-

ipated in several scientific projects funded by the Ministry of Education, Science and Technological Development of the Republic of Serbia. Dr. Z. Stanimirović is the recipient of the IEEE Transactions on Components & Packaging Technologies best paper award. His current research interests include micro/nano electro-mechanical systems and micro- and nano-scale sensors.

Ivanka P. Stanimirović has been involved in research and development work for more than 20 years. Currently, she is an associate research professor at the Institute for Telecommunications and Electronics IRITEL A.D. Beograd. Dr. I. Stanimirović earned her M.S. and Ph.D. degrees in electrical engineering from the Faculty of Electrical Engineering, University of Belgrade, Republic of Serbia in 1999 and 2007, respectively. Over the years she

has worked on several scientific projects funded by the Ministry of Education, Science and Technological Development of Republic of Serbia. She is the recipient of the IEEE Transactions on Components & Packaging Technologies best paper award. Her current research interests include micro- and nanoscale sensors and reliability issues in micro/nano electro mechanical systems.

Contents

**Section 1**

Micromachining of Advanced Materials *by Wayne N.P. Hung and Mike Corliss*

*by Tatsuhiko Aizawa and Tadahiko Inohara*

*by S. Santosh Kumar and Ravindra Mukhiya*

*Vadim Odinokov and Vadim Sologub*

**Section 2**

*by Sung-Hua Wu*

*by Jiye Yang and Tao Wu*

**Preface III**

Micromachining Techniques **1**

**Chapter 1 3**

**Chapter 2 35**

**Chapter 3 63**

**Chapter 4 83**

**Chapter 5 97**

Modelling and Simulation **115**

**Chapter 6 117**

**Chapter 7 139**

*by Zhongli Zhang, Yushan Ni, Jinming Zhang, Can Wang and Xuedi Ren*

Pico- and Femtosecond Laser Micromachining for Surface Texturing

CMOS Compatible Wet Bulk Micromachining for MEMS Applications

Physical Processes and Plasma Parameters in a Radio-Frequency Hybrid Plasma System for Thin-Film Production with Ion Assistance

*by Elena Kralkina, Andrey Alexandrov, Polina Nekludova, Aleksandr Nikonov, Vladimir Pavlov, Konstantin Vavilin,* 

Study on Specific Coefficient in Micromachining Process

Multiscale Simulation of Surface Defect Influence in Nanoindentation by a Quasi-Continuum Method

Silicon-Based Micromachining Process for Flexible Electronics

## Contents


Preface

One of the biggest challenges in today's world is the fabrication of 3D structures of a smaller and smaller size. The widening range of their application induces the necessity to micromachine diverse materials, many of them being difficult to machine. Nowadays, depending on the material to be machined, a wide variety of micromachining processes are available. The goal is to produce complex parts at enhanced material removal rates, with adequate surface integrities and dimensional

To present their work in the field of micromachining, researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. This book is the result of their hard work. In this book, you will have the opportunity to understand the concepts of micromachining of advanced materials. Surface texturing using pico- and femto-second laser micromachining is presented, as well as the silicon-based micromachining process for flexible electronics. You can learn about the CMOS compatible wet bulk micromachining process for MEMS applications and the physical process and plasma parameters in a radio frequency hybrid plasma system for thin-film production with ion assistance. Last but not least, study on the specific coefficient in the micromachining process and the multiscale simulation of influence of surface defects on nanoindentation using quasi-continuum method provides us with an insight in

The editors would like to thank the authors for their contributions and efforts to present their work in the manner that allows both professionals and readers not involved in the immediate field to understand the topic. We would also like to express special appreciation to the IntechOpen team for their dedicated work in

**Dr. Zdravko Stanimirović and Dr. Ivanka Stanimirović**

Institute for Telecommunications and Electronics IRITEL a.d. Beograd,

Technology Department,

Belgrade, Republic of Serbia

accuracies in optimum production times.

making this book possible.

modelling and simulation of micromachining processes.
