Preface

One of the biggest challenges in today's world is the fabrication of 3D structures of a smaller and smaller size. The widening range of their application induces the necessity to micromachine diverse materials, many of them being difficult to machine. Nowadays, depending on the material to be machined, a wide variety of micromachining processes are available. The goal is to produce complex parts at enhanced material removal rates, with adequate surface integrities and dimensional accuracies in optimum production times.

To present their work in the field of micromachining, researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. This book is the result of their hard work. In this book, you will have the opportunity to understand the concepts of micromachining of advanced materials. Surface texturing using pico- and femto-second laser micromachining is presented, as well as the silicon-based micromachining process for flexible electronics. You can learn about the CMOS compatible wet bulk micromachining process for MEMS applications and the physical process and plasma parameters in a radio frequency hybrid plasma system for thin-film production with ion assistance. Last but not least, study on the specific coefficient in the micromachining process and the multiscale simulation of influence of surface defects on nanoindentation using quasi-continuum method provides us with an insight in modelling and simulation of micromachining processes.

The editors would like to thank the authors for their contributions and efforts to present their work in the manner that allows both professionals and readers not involved in the immediate field to understand the topic. We would also like to express special appreciation to the IntechOpen team for their dedicated work in making this book possible.

> **Dr. Zdravko Stanimirović and Dr. Ivanka Stanimirović** Technology Department, Institute for Telecommunications and Electronics IRITEL a.d. Beograd, Belgrade, Republic of Serbia

Section 1

Micromachining Techniques

1

Section 1
