**Author details**

Gennady N. Panin1,2\* and Olesya O. Kapitanova3

\*Address all correspondence to: g\_panin@dgu.edu

1 Nano Information Technology Academy, Dongguk University, Seoul, Korea

2 Institute of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow, Russia

3 Lomonosov Moscow State University, Leninskie gory, Moscow, Russia
