**Abstract**

This chapter reviews the nanostructuring fabrications and properties of indium-tin-oxide (ITO) thin films by femtosecond laser annealing. Fundamental mechanisms of laser-induced periodic surface structures (LIPSS) and other nanostructures on ITO films are presented and discussed in detail. ITO films with large-area surface ripple structures with a multiperiodic spacing of ~800, ~400, and ~200 nm were successfully fabricated by femtosecond laser pulses, without scanning. The ITO films exhibited significant enhancement in electrical conductivity by ~30 times because of the formation and distribution of indium metal-like clusters. This metallic content of the laser-induced nanodots and nanolines further causes the anisotropic transmission characteristics in the visible range. In addition, by varying the laser fluences, nanostructures with cotton, brick, and ripple forms are generated on the surface of ITO films, which produce cyan, yellow, and orange colors. Intriguingly, the ITO films with laser-induced nanostructures can significantly attenuate blue light, thus they are potential for applications such as eye protection and information security.

**Keywords:** indium-tin-oxide (ITO), femtosecond laser annealing, laser-induced periodic surface structures (LIPSS), anisotropic transmission, laser-colorized ITO film
