Evaluation Method of Electrodeposited Metal

**3**

**Chapter 1**

**Abstract**

**1. Introduction**

**1.1 Micro-testing**

Specimens

Evaluation Methods of Mechanical

Micro-sized components have been widely used to microelectromechanical systems (MEMSs) and medical apparatus in recent years. Measurement methodologies of the mechanical property of small materials need to be improved for structural designing of these devices because of their component size reduced to micro- or nano-regime where sample size effects emerge. Mechanical properties and deformation behavior could be very different with their dimensions and geometries especially for small materials. Our experiments on the micro-specimen tested in different dimensions and loading directions are suitable for the evaluations of materials for MEMS components. In this chapter, recent studies on micro-testing of bending, compression, and tension with micro-sized samples will be presented

including fabrication methods of non-tapered micro-sized specimens.

size is in the same scales with actual MEMS components is needed.

**Keywords:** micro-testing, strength, anisotropy, microstructure, electrodeposition

Micro-sized components have been used in microelectromechanical systems (MEMSs). Recent developments of MEMS are outstandingly fast and need improved performance, reliable Device lifetime, and Miniaturization. MEMSs are often made up of components below 10 μm in size. For example, MEMS-based accelerometers or gyroscopes were widely used in smartphones, gaming consoles, and location-based devices. Some more examples shown in **Figure 1** are optical switch (a), gyro sensor (b), and micro-windmill (c) [1]. Micro-components used in MEMS such as microspring, bending beams, and structural support of MEMS suffer from mechanical straining and need suitable mechanical properties. However, at these size scales, the classical physics are not always useful. Sample size effect, which will be described in later section, emerges. Thus, the micro-testing method with specimen whose sample

Besides testing methods for small materials, micro-sized testing of each representative elementary volume in heterogeneous materials is of great interest. According to the Japanese Industrial Standards, material mechanical property evaluation requires samples with gauge length larger than the 10 mm for tensile, bend, and compression testing. These samples could include all representative

Properties of Micro-Sized

*Takashi Nagoshi, Tso-Fu Mark Chang*

## **Chapter 1**
