**7. Conclusion**

In this work, a symbolic modeling under MapleSim is presented for the purpose of trajectory generation. In addition, we presented a simulation and analysis of the MEMS capacitive pressure sensor for robot Neuromate probe using COMSOL Multiphysics. The results show that the slotted MEMS capacitive pressure sensor realizes good sensitivity and large operating pressure range. Furthermore, as the ease of designing and fabricating these devices continues to improve, researchers will increasingly turn towards MEMS as standard tools for Neurosurgery.

*Becoming Human with Humanoid - From Physical Interaction to Social Intelligence*
