Author details

high-current ion beam can improve the delivery of plasma flow to a substrate, as well as

Figure 17. Influence radial electron beam on beam focusing: (a) trajectories of cu + beam; (b) space charge density in the

We considered the transport aspect and effect of fast electrons on transport characteristics lowenergy ion plasma beam. Figure 17 shows results of modeling transport copper ion beam with current 100A through plasma lens with presence of fast electrons in the volume. One can see that accumulation high-energy electrons on the axis and their space charge can provide addi-

A new approach was proposed for the elimination of micro-droplets from the dense metal plasma, based on evaporation and thus removal of micro-droplets from the arc plasma by energetic electrons within the electrostatic PL. These electrons are generated self-consistently by secondary emission in the near-wall plasma layer from the internal surface of the lens central electrode and serves to evaporate, and thus remove micro-droplets from the plasma flow. The experiments [29] demonstrate the effectiveness of the electrostatic PL for focusing and manipulating wide-aperture, high-current, low-energy, streaming metal ion plasma flows. In these experiments, the self-sustained focusing of high-density, wide-aperture, low-energy ion plasma flow was observed. It has been shown that the presence of fast electrons in the volume of the plasma lens both improves the propagating ion plasma flow toward the substrate and introduces additional energy for effective evaporation and elimination of micro-droplets from the plasma flow.

We review some new results of development novel generation of cylindrical plasma devices based on the concept of magnetic insulation of electrons and equipotentialization magnetic field lines and an electrostatic PL configuration. The PL configuration of crossed electric and magnetic fields provides an attractive and suitable method for establishing stable plasma

providing micro-droplet removal via the fast electrons within the lens region.

tional compensation and focusing of the high-current ion beam.

286 Plasma Science and Technology - Basic Fundamentals and Modern Applications

4.3. Conclusion remarks

beam.

5. Conclusions

Iryna Litovko<sup>1</sup> \* and Alexey Goncharov<sup>2</sup>

