5. Conclusions

We review some new results of development novel generation of cylindrical plasma devices based on the concept of magnetic insulation of electrons and equipotentialization magnetic field lines and an electrostatic PL configuration. The PL configuration of crossed electric and magnetic fields provides an attractive and suitable method for establishing stable plasma discharge at low-pressure. Use of plasma lens configuration in this way was elaborated, explored and developed some cost efficiency, low-maintenance plasma devices for ion treatment, and deposition of exotic coatings with given functional properties. These devices make using permanent magnets and possess considerable flexibility with respect to spatial configuration. They can be operated as a stand-alone tool for ion treatment of substrates, or as part of integrated processing system together with cylindrical magnetron sputtering system, for coating deposition.

The research described has shown a principal possibility of a positive space charge cloud creation for negative charged particle beam focusing. It was demonstrated that possible create a positive space charge due to the magnetic electron insulation and reach strong focusing electric field, which sufficient for creation of short-focus elements to be used in systems for manipulating intense beams of negative ions and electrons. The further development of focusing properties of these devices demands study of intense negatively charged particle beams passing through the systems.

The simulations and experimental results demonstrate the high-efficiency of the electrostatic PL for focusing and manipulating wide aperture, high-current, low-energy, heavy metal ion plasma flow. These results open up new attractive way for further development and application erosion plasma sources for synthesis of exotic films and coatings with given functional properties. Some preliminary theoretical and experimental studies [27–29] have been carried out, providing confidence and optimism that the proposed idea for micro-droplet elimination has good potential for success.
