*3.2.1.4. Auto-combustion synthesis*

A redox-based combustion synthetic approach was applied to oxide thin films using acetylacetone or urea as a fuel and metal nitrates as oxidizers [55]. The self-energy-generating combustion chemistry provides a localized energy supply, eliminating the need for high, externally applied processing temperatures. Furthermore, the atomically local oxidizer supply can efficiently remove organic impurities without coke formation in combustion reactions with balanced redox chemistry. The semiconducting In<sup>2</sup> O3 annealed at temperature as low as 200°C yielded TFTs with *μ* approaching 1.0 and 13.0 cm<sup>2</sup> V−1 s−1 on SiO<sup>2</sup> and Al2 O3 gate dielectrics, respectively.
