**6. Conclusions**

The enzymatic area overlaps on the nanoporous Si area that facilitates the immobilization. The structure is introduced in drying stove for 24 hours. A top view of a piece of the processed

The final interdigitated structure comprises 98 horizontal metallic traces, which are starting

After the enzyme entrapping, the integrated biosensor was tested by capacitance-voltage (C-V) analysis. The capacitance-voltage experimental curve is measured for the final product,

The capacitance ranges from 45 nF up to a minimum of 7 nF, in agreement with p-NOI electrode structures with 8μm width and 10 μm gap space. The shape of the C-V curve

after the enzyme entrapping, but in the absence of pesticide in measured solution.

**5. The final product: a tool for the environment monitoring**

from the central pillar for each electrode, detail in **Figure 12**.

AChE membrane is presented in **Figure 11**.

**Figure 11.** The top view of a piece of the enzymatic membrane.

**Figure 10.** Final overlap of the metallic electrodes.

200 Green Electronics

The chapter presented a biosensor generated by micro-nanotechnology and biotechnology to serve as a monitoring tool to ensure a green environment condition. The fabrication steps of an integrated pesticide biosensor with AChE enzyme on nanoporous Si structure were presented. The structure of interdigitated electrodes was investigated as physical phenomena simulations inside the novel proposed planar nothing on insulator (p-NOI) structure. The contributions and purpose of this work were:


The growing technological process of the nanoporous Si layer onto the Si surface was processed by the conversion of the n-type wafer into a p-type at the surface, followed by anodization. The enzyme membrane immobilization technique was by adsorption onto the porous Si layer and fixed with glutaraldehyde by the cross-link method. Finally, the preparation of the capacitive electrodes as an interdigitated structure comprised 98 horizontal metallic p-NOI traces. The primary C-V curves checked the sensor functionality.
