**1. Introduction**

A portion of MEMS, that is, micro electro mechanical system technology has contributed in various applications of sensors and actuators, BioMEMS applications [1] in which it has played a crucial role for Micro/Nano fluidic devices and a key role for validating a factor in integration of multiple functions for different microdevice and miniaturization. These technologies of Microsystem are used widely in biomedical, disposability, low power consumption, low cost as well as it incorporates multiple phenomena physically and due to its design complications it is difficult to deploy these devices than other sensors [1].

© 2016 The Author(s). Licensee InTech. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. © 2018 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

BioMEMS has different types of devices which determines that device for this term have some manipulations in chemicals for about smallest part in form of microlitre for bacteria or proteins separation purpose of different cells (spherical and non-spherical) drug delivery and detection of contaminant with other manipulations necessary. However, some of the micro electro mechanical system (device instrument), which is attached to normal surgical instruments, is also called BioMEMS type but it is not included in such normal devices due to restriction honored and considered as technical type instrument. There are some other devices which involve itself under BioMEMS to accentuate the idea and perform all tasked from input of samples to the detection of the cells or proteins named *micro-total-analysis system.* Operations at chip scale can replace some familiar works of laboratory process known as *lab-on-a-chip* as well as for the approach for conducting measurements parallel an *array processor* are been included. There are some other term which does not belongs to the BioMEMS but it emerges with it are defined with self as *microfluidics* [1].

those bioparticles (spherical and non-spherical) to flow through gaps according to hydrodynamic flow rate and based on fluid velocity and viscosity measurement the other particles can

Micropatterning in BioMEMS for Separation of Cells/Bioparticles

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Ideally for geometry, it has a definite shape associated with the index of shape for adequate characterization. Depending on the characteristics of the bioparticles and its recognition visually is straightforward as defining in words or numerical value of a shape can be in a limited portion. Despite the efforts made in previous works in evolving a sphericity or index have created many hurdles for distributing values on the 3-dimensional complex irregular shape [9–11]. For the shape factor there is no perturbation with it for changes in the drag force of particle for spherical and non-spherical as there has been a development in the dynamic shape factor relatively. This ratio of drag force is calculated for the forces experienced by the spherical or nonspherical particle over the ratio of other particles with the volume equivalently flowing with the medium and same flow velocity. Other than spherical particle there is a an phenomenon change in the non-spherical particle as understanding the indexing of non-spherical particle is important with the chemical, physical, biological functions and other phenomenon by which the changes in the effect of bioparticles cannot be denied. However the anatomy of some proteins molecule to the utmost dimensions of galaxies and stars neglecting the effect of shape can be made. Interaction with the analysis of particles deeply requires some considerations of shape for behavior in the system of the particle in applications practically to conclude [8] (**Figure 1**).

In recent years for studies of application on cell separation there were many techniques extended which emerged in the field of microfluidics for biomolecular analysis which are initially driven as per requirement. While manipulation and Cell separation is a crucial sample step for processing in many medical assays and low Reynolds numbers as well as predictable flows, small fluid volumes, small dimensions, materials and the established microfabrication

be sorted individually for precise outcome [8].

**2.2. Techniques for sorting**

**Figure 1.** Types of bacteria present with its size of shape [12].

**2.1. Bioparticles of spherical and non-spherical shape**

A splendid addition has been exhibited which allows for the sorting depending on selection and different interests in analytes [2–4]. Thus this chapter deals with the different techniques used for separation and for micropatterning of array channels used in different applications of biomedicals and other BioMEMS terms. First part of this chapter deals with the active and passive approaches for bioparticles and cellular separation depending on the fluid velocities and its concentration depending on applications and designing. The second half of the chapter focuses on the simulations of the sorting and the detection techniques [5].
