Contents

## **Preface XI**


Chapter 6 **RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits 117** Lluis Pradell, David Girbau, Miquel Ribó, Jasmina Casals-Terré, Antonio Lázaro, Adrián Contreras, Marco Antonio Llamas, Julio Heredia, Flavio Giacomozzi and Benno Margesin

#### **X** Contents


Preface

the future.

function precisely.

MEMS as a part of various applications ranging from smartphones to automobiles has be‐ come an integral part of our everyday life. MEMS is building synergy between previously unrelated fields such as biology, microelectronics, optics and communications, to improve the quality of human life and open up new applications previously unimagined. Many new MEMS applications will emerge beyond what they are currently identified as or known for. The sensors in MEMS gather information from the surroundings, which are then processed by the electronics for decision-making to control the environment. MEMS offers opportuni‐ ties to miniaturize devices, integrate them with electronics and realize cost savings through batch fabrication. MEMS technology has enhanced many important applications in domains such as automotive, consumer electronics, industrial automation, military applications, bio‐ technology and communication, and it holds great promise for continued contributions in

This book focuses on understanding the design, development and applications in which the MEMS sensors can be used. The book is divided into four sections. The first section focuses on the design and development techniques for MEMS gyroscope and electret electrostatic harvesting for MEMS. The second and third sections focus on BioMEMS and RF MEMS sen‐

In this chapter, the structure design and electrostatic compensation technology for dualmass MEMS gyroscope are introduced. First, a classical dual-mass MEMS gyroscope struc‐ ture is proposed; it works as a tuning fork (drive antiphase mode) and the structure dynamical model and the monitoring system are presented. Second, the imperfection ele‐ ments during the structure manufacture process are analyzed and the quadrature error cou‐ pling stiffness model for dual-mass structure is proposed. After that, the quadrature error correction system based on coupling stiffness electrostatic compensation method is designed and evaluated. Third, the dual-mass structure sensing mode modal is proposed and the force rebalancing comb stimulation method is utilized to achieve sensing mode transform

In this chapter, the electret electrostatic harvesting structure is presented and analyzed to conclude that electret electrostatic harvesting structure is a kind of ideal energy harvesting method using ambient vibration and can be easily integrated with the MEMS system be‐

sors and the fourth section focuses on new areas of applications for MEMS sensors.

*Chapter 1. Dual-Mass MEMS Gyroscope Structure Design and Electrostatic Compensation*

**Section I: MEMS Design and Implementation**

*Chapter 2.Integrated Power Supply for MEMS Sensor*

cause of its compatibility with MEMS technology.

Chapter 9 **MEMS Technologies Enabling the Future Wafer Test Systems 189** Bahadir Tunaboylu and Ali M. Soydan
