**Meet the editor**

Dr. Siva Yellampalli is currently working as a principal at VTU Extension Centre, UTL Technologies Ltd. He obtained his MS and PhD degrees from the Louisiana State University. His area of research focuses on system-level design for power optimization. His area of research encompasses different research fields such as VLSI, mixed signal circuits/systems development, MEMS, and

CNT sensors. He published a book in the area of mixed-signal design and edited two books on carbon nanotubes. He published 100 plus international journal papers and IEEE conference papers. In addition, he delivered keynote speeches at international conferences held in Canada, Dubai and Spain including tutorials at various IEEE international conferences. He has been a consultant to various semiconductor companies.

Contents

**Preface VII**

**Section 2 BioMEMS 47**

**Section 3 RF MEMS 91**

**Section 1 MEMS Design and Implementation 1**

**Electrostatic Compensation 3** Huiliang Cao and Jianhua Li

Chapter 2 **Integrated Power Supply for MEMS Sensor 25**

Chapter 3 **Enzyme Biosensors for Point-of-Care Testing 49**

Tong Li, Yuanyuan Liu and Jun Wang

Chapter 4 **Micropatterning in BioMEMS for Separation of**

**Cells/Bioparticles 71**

**Applications 93**

Hai-peng Liu, Lei Jin, Shi-qiao Gao and Shao-hua Niu

Rajagopal Kumar and Fenil Chetankumar Panwala

Chapter 5 **Study and Design of Reconfigurable Wireless and Radio-**

Chunxiu Liu, Chenghua Xu, Ning Xue, Jian Hai Sun, Haoyuan Cai,

**Frequency Components Based on RF MEMS for Low-Power**

Bassem Jmai, Adnen Rajhi, Paulo Mendes and Ali Gharsallah

Lluis Pradell, David Girbau, Miquel Ribó, Jasmina Casals-Terré, Antonio Lázaro, Adrián Contreras, Marco Antonio Llamas, Julio

Chapter 6 **RF-MEMS Switches Designed for High-Performance Uniplanar**

Heredia, Flavio Giacomozzi and Benno Margesin

**Microwave and mm-Wave Circuits 117**

Chapter 1 **Dual-Mass MEMS Gyroscope Structure, Design, and**
