Acknowledgements

The authors like to thank Prof. Liwei Lin and the members of Lin laboratory. The VLSI chip in this study was fabricated by Digian Technology Inc. This work was supported by VLSI Design and Education Center (VDEC), the University of Tokyo in collaboration with Synopsys Inc., Cadence Design Systems Inc., and Mentor Graphics Inc. The fabrication of the hexapod robot was supported by the Research Center for Micro Functional Devices, Nihon University. The authors appreciate to all above supports.
