**MICRO/ NANOLITHOGRAPHY - A HEURISTIC ASPECT ON THE ENDURING TECHNOLOGY**

Edited by **Jagannathan Thirumalai**

#### **Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology**

http://dx.doi.org/10.5772/intechopen.68234 Edited by Jagannathan Thirumalai

#### **Contributors**

Amalraj Peter Amalathas, Maan Alkaisi, Jagannathan Thirumalai, Yanqing Wu, Shumin Yang, Hongbo Lan, Sujatha Lakshminarayanan, Ahmed Nassouh Awad, Atushi Takahashi, Chikaaki Kodama

#### **© The Editor(s) and the Author(s) 2018**

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First published in London, United Kingdom, 2018 by IntechOpen eBook (PDF) Published by IntechOpen, 2019 IntechOpen is the global imprint of INTECHOPEN LIMITED, registered in England and Wales, registration number: 11086078, The Shard, 25th floor, 32 London Bridge Street London, SE19SG – United Kingdom Printed in Croatia

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Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology Edited by Jagannathan Thirumalai p. cm. Print ISBN 978-1-78923-030-7 Online ISBN 978-1-78923-031-4 eBook (PDF) ISBN 978-1-83881-293-5
