**5. Conclusions**

FL-C:H films have been grown via PECVD and reactive magnetron sputtering methods. Such films with curved graphene dispersed in amorphous matrix, show elastic recovery (≥80), hardness (variation from 10 to 30 GPa) as well as low friction properties. Sometimes, FL-C:H films depict superlubricity within limited situation with the lowest coefficient value to 0.002. We believe that superlubricity of FL-C:H films benefits from the unique fullerene-like structure, which provide raw materials to grow onion-like nanoparticles during friction tests. In addition, these particles have a chemically inert surface, which reduces the couple of dual interface via offering incommensurate and rolling contact. But, further developing of the superlubricity properties of the FL-C:H films to wide adaptability is very important to broad practicability.
