**6. Acknowledgements**

The author express heartfelt applications to his collaborators, Mr. Hiroyuki Katsumata, Mr. Takayuki Fujiya, Mr. Daiki Hoshino, Mr. Tsuyoshi Morita, Mr. Yutaka Chida, Mr. Zongfan Duan, Mr. Yutaro Suzuki, Mr. Shou Ogihara, Mr. Syota Kaihatsu, Mr. Masahiro Higashi, and other students. The staffs of the Micro Functional Device Research Center are also appreciated.
