**7. Overview and outlook**

For the introduction of gas-sensitive FETs, a broad overview of catalytic-gate FETs, solid electrolyte-based FETs, suspended-gate FETs, and nanomaterial-based FETs is given in this chapter. Arrays of these sensors can be combined with computational pattern recognition methods. As introduced, the combination of cross-reactive gas sensor arrays with pattern recognition methods is a promising method for the recognition of analytes in the gas phase. Cross-reactive sensor arrays should contain sensors that are responsive to a broad range of analytes and have differential sensitivity. Conventional semiconductor processes can be used for miniaturization of FET-based sensors. FET-based sensors may have advantages over other sensors used in device miniaturization of cross-reactive sensor arrays.
