**Field-Effect Transistors for Gas Sensing**

Toshihiro Yoshizumi and Yuji Miyahara

Additional information is available at the end of the chapter

http://dx.doi.org/10.5772/intechopen.68481

#### **Abstract**

This chapter reviews gas-sensitive field-effect transistors (FETs) for gas sensing. Although various types of gas sensors have been reported, this review focuses on FET-based sensors such as catalytic-gate FETs, solid electrolyte-based FETs, suspended-gate FETs, and nanomaterial-based FETs. For recognition of analytes in the gas phase, the combination of cross-reactive gas sensor arrays with pattern recognition methods is promising. Crossreactive sensor arrays consist of gas sensors that have broad and differential sensitivity. Signals from the cross-reactive sensor array are processed using pattern recognition methods. Reports of FET-based sensor arrays combined with pattern recognition methods are briefly reviewed.

**Keywords:** gas-sensitive field-effect transistor, gas sensor, cross-reactive sensor array, pattern recognition method
