**Meet the editor**

Dr. Miao Zhong is a Project Researcher at the School of Engineering of the University of Tokyo, where he received his PhD degree in 2012. His research interests include solid/liquid interface, chemistry and surface science, solid solution in the form of thin films and nanowire arrays, and epitaxial growth of high-quality films and nanostructures using (MO) CVD and MBE. His wide portfolio includes chapter publications, journal publications, conferences, and proceedings.

Contents

**Preface VII**

**Engineering 1**

**Section 1 High-Quality Epitaxy of Functional Heterostructures with Strain**

Chapter 1 **Strain Effect in Epitaxial Oxide Heterostructures 3** Abhijit Biswas and Yoon Hee Jeong

Chapter 3 **Electrical Properties of Epitaxial Ferroelectric**

**Heterostructures 67**

**Microscopy 93**

Chapter 2 **Epitaxial Growth of Ge on Si by Magnetron Sputtering 45**

Chapter 4 **Tm on W(110): A Growth Study by Scanning Tunneling**

**Section 2 Epitaxy Monte Carlo Simulation and Reactor Design 111**

Chapter 5 **Monte Carlo Simulation of Epitaxial Growth 113**

Abramof and Jerônimo dos S. Travelho

Chapter 6 **Silicon Epitaxial Reactor for Minimal Fab 131**

Ziheng Liu, Xiaojing Hao, Anita Ho-Baillie and Martin A. Green

Andra Georgia Boni, Cristina Florentina Chirila, Raluca Negrea, Corneliu Ghica, Iuliana Pasuk, Ioana Pintilie and Lucian Pintilie

David Coffey, José I. Arnaudas, David Serrate and Miguel Ciria

Celso I. Fornari, Gabriel Fornari, Paulo H. de O. Rappl, Eduardo

Ning Li, Hitoshi Habuka, Yuuki Ishida, Shin-ichi Ikeda and Shiro Hara
