**Interferometry and its Applications in Surface Metrology Interferometry and its Applications in Surface Metrology**

Dahi Ghareab Abdelsalam and Baoli Yao Dahi Ghareab Abdelsalam and Baoli Yao Additional information is available at the end of the chapter

Additional information is available at the end of the chapter

http://dx.doi.org/10.5772/66275

### **Abstract**

**Author details**

80 Optical Interferometry

Louisiana, USA

**References**

Sanichiro Yoshida1\*, David R. Didie1

\*Address all correspondence to: syoshida@selu.edu

ence and Technology, Nowon-gu, Seoul, South Korea

, Jong-Sung Kim2

1 Department of Chemistry and Physics, Southeastern Louisiana University, Hammond,

2 Department of Mechanical and Automotive Engineering, Seoul National University of Sci-

[1] Lemons RA, Quate CF: Acoustic microscopy. In: Mason WP, Thurston RN, editors.

[2] Weglein RD: Acoustic microscopy applied to SAW dispersion and film thickness

[3] Atalar A: An angular-spectrum approach to contrast in reflection acoustic microscopy.

[4] Atalar A: A physical model for acoustic signatures. J. Appl. Phys. 1979; 50: 8237–8239.

[5] Telschow KL, Deason VA, Cottle DL, Larson JD: III: Full-field imaging of gigahertz film

[6] Yoshida S, Didie DR, Didie D, Sasaki T, Park HS, Park IK, Gurney D: Opto-acoustic method for the characterization of thin-film adhesion. Appl. Sci. 2016; 6: doi:10.3390/

[7] Sciammarella CA, Sciammarella FM: Experimental Mechanics of Solids. Hoboken:

[8] Effect of Temperature on Refractive Index (dn/dt). Available from: http://www.ohara-

[9] Bedrossian J, Kohn RV: Blister patterns and energy minimization in compressed thin films on compliant substrates. Commun. Pure Appl. Math. 2015; 68: 472–510.

[10] Dennenberg H: Measurement of adhesion by a blister method. J. Appl. Polym. Sci. 1961;

[11] Volinsky AA, Moody NR, Gerberich WW: Interfacial toughness measurements for thin

Physical Acoustics. London: Academic Press; 1979; Vol. XIV, pp. 1–92.

bulk acoustic random motion. IEEE. Trans. Ultrason. 2003; 94: 79–88.

gmbh.com/e/katalog/tinfo\_2\_4.html [Accessed on 2016-09-11].

films on substrates. Act Mater. 2002; 50: 441–466.

measurement. IEEE. Trans. Sonics. 1980; 27: 82–86.

J. Appl. Phys. 1978; 49: 1530–1539.

Wiley; 2012. ISBN-10: 0470689536.

app6060163.

5: 125–134.

and Ik-Keun Park2

Interferometry has been a time-honored technique for surface topography measurement. Interferometric measurements of surface shape are relative measurement techniques in which the shape of a known surface is compared with that of an unknown surface, and the difference is displayed as a series of interference fringes. Noise attached in the interference fringes can have catastrophic effects on the phase-unwrapping process, so denoising is essential before reconstruction. Some noise may be generated due to vibrations when multiple images over a finite time period are captured for reconstruction by phase-shifting technique. This harmful noise is drastically reduced when fast phase shifting–based single-shot parallel four-step combined with Fizeau interferometer is applied. Measuring the shape of strongly curved surfaces using twobeam interferometry is very complicated due to the higher fringe density. This problem may be solved by multiple-beam interferometry, thanks to the very sharp interference fringes. The experimental results show the feasibility and high precision of multiplebeam interferometry.

**Keywords:** interferometry, surface topography, optical aberrations, phase shifting, phase unwrapping
