**Microtopography and Thickness Measurement with Digital Holographic Microscopy Highlighting and Its Tomographic Capacity Microtopography and Thickness Measurement with Digital Holographic Microscopy Highlighting and Its Tomographic Capacity**

Miguel León-Rodríguez, Juan A. Rayas-Alvarez, Amalia Martínez-García and Raúl R. Cordero Amalia Martínez-García and Raúl R. Cordero Additional information is available at the end of the chapter

Miguel León-Rodríguez, Juan A. Rayas-Alvarez,

Additional information is available at the end of the chapter

http://dx.doi.org/10.5772/66750

#### **Abstract**

The refocusing capacity is a unique feature of digital holography. In this chapter, we show the capability of reconstructing digital holograms at different planes for different purposes. One of such purposes is to increase the focus depth of the microscope sys‐ tem. First, we show experimental results of the feasibility to perform digital holographic microscopy (DHM) using a Mirau interferometric objective. A profile phase compari‐ son of a 4.2 μm high microlens using interferometry and DHM, extending the depth of focus of the microscope objective as proof of the proposal, is presented. Second, it is also useful in reducing shot noise when using an LED as a light source. In order to attain the reduction noise, we performed an averaging process of phase and amplitude images reconstructed at different reconstruction distances. This reconstruction range is performed within the focus depth of the optical system. We get a reduction of 50% shot noise. Finally, we show a strategy based on this tomographic capability of reducing a ringing effect by using an ideal filter in off‐axis digital holography.

**Keywords:** digital holographic microscopy, phase‐contrast imaging, optical metrology, tomography, phase‐shifting
