**1. Introduction**

Much research on anisotropic Nd-Fe-B film magnets thicker than several microns was carried out in order to advance miniaturized electronic devices including micro-electro-mechanicalsystems (MEMS) [1–7]. It is generally known that the (*BH*)max value of an isotropic Nd-Fe-B film [8, 9] is smaller than that of an anisotropic Nd-Fe-B one; however, the flexibility of magnetiza‐ tion of the isotropic films is attractive in practical and various applications. Töpfer et al. demonstrated a multipolarly magnetized isotropic Nd-Fe-B film using a screen printing method

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[10]. Yamashita et al. also reported that the torque of a milli-size motor comprising a multipo‐ larlymagnetizedisotropicthickfilmexceededthetorqueofamotorusingananisotropicone[11].

In Sm-Co thick-film magnets, we have difficulty in overcoming the values of (*BH*)max for Nd-Fe-B films due to the low saturation magnetization. However, several researchers have demonstrated Sm-Co thick films because of their high Curie temperature and good corro‐ sion resistance [12–19]. For example, Cadieu et al. reported in-plane anisotropic Sm-Co films with a thickness above 100 μm using sputtering together with pulsed laser deposition (PLD) methods [16, 17]. In addition, Budde and Gatzen demonstrated a magnetic micro-actuator comprising a sputtering-made 30-μm-thick Sm-Co film [19].

Fe-Pt magnet is a promising material to use in the medical field owing to its outstanding biocompatibility [20]. In orderto advance medicalMEMS, the miniaturization of Fe-Pt magnets is necessary [21]. Aoyama and Honkura [22] and Liu et al. [23] reported isotropic Fe-Pt film magnets thicker than several microns using a sputtering method from the medical applica‐ tion point of view.

Here, we show the properties of isotropic Nd-Fe-B [24–28] thick-film magnets prepared using the PLD method and several miniaturized machines [24, 25, 28] comprising the Nd-Fe-B thick film. Moreover, PLD-fabricated isotropic Sm-Co, Fe-Pt, and nano-composite Nd-Fe-B+α-Fe thick films were introduced.
