Philippe Benech and Jean‐Marc Duchamp

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http://dx.doi.org/10.5772/63125

#### **Abstract**

The development of several types of mobile objects requires new devices, such as high‐performance filters, microelectromechanical systems and other components. Pie‐ zoelectric materials are crucial to reach the expected performance of mobile objects because they exhibit high quality factors and sharp resonance and some of them are compatible with collective manufacturing technologies. We reviewed the main piezo‐ electric materials that can be used for radio frequency (RF) applications and herein report data on some devices. The modelling of piezoelectric plates and structures in the context of electronic circuits is presented. Among RF devices, filters are the most critical as the piezoelectric material must operate at RF frequencies. The main filter structures and characterisation methods, in accordance with such operating condi‐ tions as high frequencies and high power, are also discussed.

**Keywords:** radio frequency, filters, MEMS, modelling, characterisation
