**6. Acknowledgments**

We are thankful to Dr. Moses Noh for providing supplies and micro-fabrication facilities for polymer coating.

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**8. Appendix II (Symbols)** 

v1 = input particle velocity (m/s) v2 = output particle velocity (m/s)

k = propagation constant (m-1)

A = area of active electrode of MTSM (m2)

Z = acoustic impedance (acoustic ohm)

C0 = static capacitance of MTSM (F)

*Chem*. 77. 4918-4926.

University, PhD Thesis

14, 248-251.

F1 = input force (N) F2 = output force (N)

d = thickness (m)

φ: transformer ratio

**9. References** 

I = current (C)
