**5. Conclusion**

One can draw the following conclusions on the basis of the conducted researches:


(*ξ* = 0–180°) have been calculated at Ne ion bombardment. It was shown that effective and layer-by-layer sputtering is possible near threshold angle and energy sputtering. The obtained results allow to select the optimum conditions for obtaining implanted depth distributions with demanded shape in narrow near-surface regions (5–10 atomic layers) of crystals.

**•** It was shown that the sort and adsorption site of the adatoms one can determined by the instrumentality of the rainbow effect in the angular distributions of transmitted channeled particles provided by their interaction with adatoms above the rear surface of the crystal. The accuracy with which the adatom adsorption site with respect to the unit cell in the transverse plane of the channel can be determined is evaluated as ~0.1 Å.
