**Fabrication of Three-Dimensional Concave or Convex Shell Structures with Shell Elements at Micrometer Resolution in SU-8**

Louis WY Liu, Qingfeng Zhang and Yifan Chen

Additional information is available at the end of the chapter

http://dx.doi.org/10.5772/62405

#### **Abstract**

This chapter presents a photo-lithographically-based technology for mass production of three-dimensional (3D) micro-structures with shell elements. In this technology, shell elements are photo-lithographically fabricated at micron or sub-micron resolution by illuminating with ultraviolet light radiating an ultraviolet light beam onto UV-opaque SU-8 monomer. The technology does not require any steps involving micro-injection molding or micro-stereolithography. Several prototypes have been fabricated to demonstrate the feasibility of this technology.

**Keywords:** SU-8, Micro-fabrication, Injection molding, Micro-stereolithography, Graytone lithography
