**8. Acknowledgements**

322 Advanced Holography – Metrology and Imaging

Fig. 13. Surface topographies obtained from reconstructed images and heights of the markers in different regions of the object. a), b) show the region close to the edge of the spacer where high slope is revealed in the Al foil while c), d) show region approximately 200 μm away from the edge with lower Al foil slope. b), d) are the projections of the 3-D plots on

In this chapter the EUV table-top holographic imaging using a compact EUV laser as the illumination source was presented. The spatial resolution of the images of AFM tips, obtained by numerical reconstruction, was assessed utilizing a wavelet image decomposition and image correlation method leading to 164 nm. By increasing the numerical aperture of the recording and digitization wavelength-resolution EUV holograms were generated. The images were numerically reconstructed from the hologram recorded in surface of the photoresist and digitized with the AFM. Images of carbon nanotubes were obtained with 46±2 nm resolution determined by a knife edge test. Continuing development of highly coherent table-top EUV/SXR lasers in the vicinity of 10 nm (Wang et al., 2006) can be expected to enable future holographic imaging only limited by the photoresist resolution. Increasing flux of the EUV and SXR table top lasers opens a perspective in the future for

x-z plane to better visualize the slopes.

**7. Conclusions** 

This work was supported by the National Science Foundation ERC for Extreme Ultraviolet Science and Technology, Award Number EEC-0310717. The authors thank to Prof. Randy Bartels, Prof. Carmen Menoni and Prof. Jorge Rocca for their constructive comments and helpful discussions during the experiments presented herein.

First author would also like to acknowledge the support from Foundation for Polish Science, Homing 2009 Program, award number HOM/2009/14B, related to novel, high resolution imaging techniques.
