Preface

VI Contents

Chapter 9 **Measurement of Frictional** 

Kenji Fukuzawa

**Properties on the Micro/Nanometer Scale 189** 

Thanasegaran Suganya, Zhao Cheng and Sachiko Ito

**and Personalized Therapy of Failed Organs by Stem Cells 207** 

Chapter 10 **Tissue Damage and Repair Caused by Immune System** 

Chapter 11 **Tribology for Biological and Medical Applications 221** 

Takayuki Tokoroyama and Hiroyuki Kousaka

**Titanium Implants Using Hydroprocessing and Evaluation of Their Osteoconductivity 287** 

**a Novel Cell Interrogation Platform 299** 

Masaru Takeuchi, Gauvain Haulot and Chih-Ming Ho

**Regenerative Medicine for Bone Regeneration 321** 

Kensuke Kuroda and Masazumi Okido

Chapter 16 **Transferrin-Toxin Conjugates for Cancer 315** 

Hideharu Hibi and Minoru Ueda

Chapter 18 **MEMS Sensors and Their Applications 331** 

Toshio Fukuda, Masahiro Nakajima, Yajing Shen and Masaru Kojima

Chapter 19 **Single Cell Nanosurgery System 353** 

Chapter 12 **Micro-Nano Materials Characterization and Inspection 241** 

Ken-ichi Isobe, Naomi Nishio,

Noritsugu Umehara,

Chapter 13 **Aerospace Application 271**  Akihiro Sasoh

Chapter 14 **Hydroxyapatite Coating on**

Chapter 15 **System Integration of**

Daniel T. Kamei

Mitsuhiro Shikida

Chapter 17 **Tissue Engineering and** 

Yang Ju

Micro/Nano mechatronics is currently used in broader spectra, ranging from basic applications in robotics, actuators, sensors, semiconductors, automobiles, and machine tools. As a strategic technology highlighting the 21st century, this technology is extended to new applications in bio-medical systems and life science, construction machines, and aerospaceequipment, welfare/human life engineering, and other brandnew scopes. Basically, the miniaturizing technology is important to realize high performance, low energy consumption, low cost performance, small space instrumentation, light-weight, and so on.

In this book, the states of art of research progress are summarized through our project "COE for Education and Research of Micro-Nano Mechatronics" and the R&D in "Center For Micro-Nano Mechatronics" at Nagoya University. Our project strives to foster "young researchers who dare to challenge unexploited fields" by building a novel interdisciplinary field based on micro-nano mechatronics. This field is important to promote "the world-highest-level of micro-nano mechatronics research with an emphasis on originality" from a viewpoint of not only the acquisition of advanced technology, but also social issues.

Our project implements a strategy to realize applications of micro-nano mechatronics, which are based on mechanical engineering or materials science, control systems engineering, and advanced medical engineering. As shown in Figure 1, the proposed research teams include "Nanocontrol engineering", "Nano measurement engineering", "Nano design and manufacturing", and "Nano materials science".

By establishing joint research and international collaborations between the above research teams, we have created the most advanced micro-nano mechatronics. We have also trained the researchers who can comprehend industrial circles and social issues using an open cluster system as well as conduct research to solve problems spanning these four basic fields. In particular, we initially focus on tasks in the bio- or medical welfare technologies using a number of unexploited fields, which may consequently produce venture enterprises.

**Figure 1.** Innovations by micro-nano mechatronics.

We acknowledge the excellent contributions of all people to contribute the chapters for this book. We express our sincere appreciation for the publication of this book supported by Nagoya University, the 21st COE program "Micro- and Nano-Mechatronics for Information-Based Society", and the global COE program "COE for Education and Research of Micro-Nano Mechatronics". This book would not have been possible without these generous supports.

Nagoya, December 2012

**Toshio Fukuda**  Graduate School of Engineering, Nagoya University Japan **Chapter 1**

**Research and Technology on Micro-Nano Mechatronics**

In our daily life, various devices are applied for automobiles, computer peripheries, printers, cameras, amusements, robotics, automation, environmental monitoring, energy resource, biological/medical treatments, and so on "Microtechnology" was commonly used to realize high‐efficiency, high‐integration, high‐functionality, low‐energy consumption, low‐cost, miniature, and so on By miniaturizing the elemental devices on sensors, actuators, and computers in micro‐scale, "Micromechatronics" came up as the one of the important technol‐ ogy Recently, "Nanotechnology" has an important role in the industrial applications as an advanced field of mechatronics named as "Nanomechatronics" The micro‐nano mechatronics is basically defined to integrate major three technologies "Controller", "Sensor" and "Actua‐

Figure 2 shows the demands of micro‐nano mechatronics for various social and industrial applications For various applications for industry, some techniques are important, especially micro/nano fabrication, assembly, control, material, and evaluation techniques Micro‐nano mechatronics is based on various technologies, especially life science, medicine, sensing/ actuating, material science, energy/power, and design/control From social aspects, human resource, environmental issue, saving energy, safety/security, medical/health, and aging population are currently demanded From industrial aspects, service robots, dependable products, tailor‐made products, alternative energy, techno‐care service, environmental friendly products, are particularly demanded The micro‐nano mechatronics is a key technol‐

tor" based on the electronics and mechanical engineering as depicted in Figure 1.

ogy to solve those problems/issues and leading conventional technologies for future.

The applications of micro‐nano mechatronics are mainly categorized into the "Mechanical", "Electrical", and "Biological/Medical" applications The key point for the categorization is inorganic (wet) and organic (dry) "Mechanical" applications are relatively based on the inorganic materials or technologies, such as lithography technique On the other hand, "Biological/Medical" applications, the organic materials or technologies are used, such as self‐

> © 2013 Fukuda et al.; licensee InTech. This is an open access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

© 2013 Fukuda et al.; licensee InTech. This is a paper distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Toshio Fukuda, Masahiro Nakajima and

Masaru Kojima

**1. Introduction**

**Chapter 1**
