Contents

## Preface **XIII**


X Contents


Preface

instrumentation, light-weight, and so on.

technology, but also social issues.

consequently produce venture enterprises.

Micro/Nano mechatronics is currently used in broader spectra, ranging from basic applications in robotics, actuators, sensors, semiconductors, automobiles, and machine tools. As a strategic technology highlighting the 21st century, this technology is extended to new applications in bio-medical systems and life science, construction machines, and aerospaceequipment, welfare/human life engineering, and other brandnew scopes. Basically, the miniaturizing technology is important to realize high performance, low energy consumption, low cost performance, small space

In this book, the states of art of research progress are summarized through our project "COE for Education and Research of Micro-Nano Mechatronics" and the R&D in "Center For Micro-Nano Mechatronics" at Nagoya University. Our project strives to foster "young researchers who dare to challenge unexploited fields" by building a novel interdisciplinary field based on micro-nano mechatronics. This field is important to promote "the world-highest-level of micro-nano mechatronics research with an emphasis on originality" from a viewpoint of not only the acquisition of advanced

Our project implements a strategy to realize applications of micro-nano mechatronics, which are based on mechanical engineering or materials science, control systems engineering, and advanced medical engineering. As shown in Figure 1, the proposed research teams include "Nanocontrol engineering", "Nano measurement engineering",

By establishing joint research and international collaborations between the above research teams, we have created the most advanced micro-nano mechatronics. We have also trained the researchers who can comprehend industrial circles and social issues using an open cluster system as well as conduct research to solve problems spanning these four basic fields. In particular, we initially focus on tasks in the bio- or medical welfare technologies using a number of unexploited fields, which may

"Nano design and manufacturing", and "Nano materials science".
