**4. Summary**

In this chapter, the basics and latest research results of FFM, which is one of the key measure‐ ment methods for micro/nano mechatronics, is described. FFM can provide the local friction properties on the micro/nano scale. FFM is widely used in tribology and material characteri‐ zation as chemical force microscopes. Dual‐axis probes are new types of FFM probes, which can overcome the significant drawbacks of the conventional cantilever probes, especially, the reduction of the mechanical interference between the lateral friction force and vertical load. However, the dual‐axis probes have problems to be solved such as the lateral displacement detection method. The micro mechanical probe can overcome the problems and is possible to elevate the FFM from a visualization tool to the quantitative evaluation method for local friction properties on the micro/nano scale. This is expected to be a useful method for designing micro/nano mechatronic devices such as MEMS/NEMS or the head‐disk lubrication of HDDs and improve their performance drastically.
