**1. Introduction**

**Figure 1.** Innovations by micro-nano mechatronics.

ナノ 計測学 細胞、 たんぱく 質 などの機能性材料 の計測評価分子膜 圧力センサ

ロニク

ナノ

と する機械的操作する機械的操作ナノ 治療・ 手術

質などの機能性材料の計測評価分子膜設計・ 製造学ナノ 分子・

Nano measurement engineering

•

ナノ 制御学 微小物体・ 分子・ 細胞などを対象 と する機械的操作

Nano control engineering

細胞バイ オ メ カ ト ロニク ス •人工組織構築 •バイ オミ メ ティ ッ ク 材料

 ス•人工組織構築•バイ 材料細胞バイメカトロニクス•人工組織構築•

Mechatronics for cell control and biology

**Mechatronic devices for regeneration & induction of biomedical tissue**

been possible without these generous supports.

Nagoya, December 2012

We acknowledge the excellent contributions of all people to contribute the chapters for this book. We express our sincere appreciation for the publication of this book supported by Nagoya University, the 21st COE program "Micro- and Nano-Mechatronics for Information-Based Society", and the global COE program "COE for Education and Research of Micro-Nano Mechatronics". This book would not have

マイ ク ロ ・ ナノ メ カ ト ロ ニク ス基盤技術分野の確立

Technology of Micro‐Nano Mechatronics

実用化を目指すマイ ク ロ ・ ナノ メ カ ト ロニク スの確立

System Integration with Micro‐Nano Mechatronics

メ ティ 健康福祉 カト適応リ ハビリ

ナノ 設計・ 製造学 超精密マイ ク ロ・ ナノ 構造の設計・

Nano design and manufacturing

センサ治療・メロニク•ロ 手術ロボッ •

ナノ 材料科学 薄膜の機械物性・ 表面の新機能創成

Nano materials science

健康福祉 メ カ ト ロニク ス •適応リ ハビリ システム •健康モニタ センサ

メカト ロニクス 適応リ ハビリ システム•セン サ

Mechatronics for well-being and rehabilitation

**Treatment techniques based on live organ transplant of cultured cell and tissue**

製造

Research fields and two-dimensional matrix structure

メ カ ト ロニク ス •マイ ク ロ手術ロボッ ト •治療訓練ロボッ ト

<sup>メ</sup> カトロニクスマイ ク ロ 手術ロボッ ト

Mechatronics for medicine and medical operation

Advanced research fields of bio/medical technology

**Toshio Fukuda** 

Japan

Graduate School of Engineering, Nagoya University

In our daily life, various devices are applied for automobiles, computer peripheries, printers, cameras, amusements, robotics, automation, environmental monitoring, energy resource, biological/medical treatments, and so on "Microtechnology" was commonly used to realize high‐efficiency, high‐integration, high‐functionality, low‐energy consumption, low‐cost, miniature, and so on By miniaturizing the elemental devices on sensors, actuators, and computers in micro‐scale, "Micromechatronics" came up as the one of the important technol‐ ogy Recently, "Nanotechnology" has an important role in the industrial applications as an advanced field of mechatronics named as "Nanomechatronics" The micro‐nano mechatronics is basically defined to integrate major three technologies "Controller", "Sensor" and "Actua‐ tor" based on the electronics and mechanical engineering as depicted in Figure 1.

Figure 2 shows the demands of micro‐nano mechatronics for various social and industrial applications For various applications for industry, some techniques are important, especially micro/nano fabrication, assembly, control, material, and evaluation techniques Micro‐nano mechatronics is based on various technologies, especially life science, medicine, sensing/ actuating, material science, energy/power, and design/control From social aspects, human resource, environmental issue, saving energy, safety/security, medical/health, and aging population are currently demanded From industrial aspects, service robots, dependable products, tailor‐made products, alternative energy, techno‐care service, environmental friendly products, are particularly demanded The micro‐nano mechatronics is a key technol‐ ogy to solve those problems/issues and leading conventional technologies for future.

The applications of micro‐nano mechatronics are mainly categorized into the "Mechanical", "Electrical", and "Biological/Medical" applications The key point for the categorization is inorganic (wet) and organic (dry) "Mechanical" applications are relatively based on the inorganic materials or technologies, such as lithography technique On the other hand, "Biological/Medical" applications, the organic materials or technologies are used, such as self‐

**Basic Level High Integration Level**

Micro‐Nano Computing/ Information Technology 

Research and Technology on Micro-Nano Mechatronics 3

Micro‐Nano Energy Generation/ Storage Technology 

Micro‐Nano Actuation Technology 

Micro‐Nano Assembly Technology 

**Integration**

Basically, nanotechnology is placed in the combinations of the top‐down and bottom‐up approaches The possibility to control the structure of matter atom by atom was first discussed by Richard Feynman in 1959 seriously [1] One of the approaches to fill the gap between top‐ down and bottom‐up approaches is "Nanomanipulation", which realizes controlling the position atthe micro/nanometer scale, is considered to be one ofthe promising ways It might be a key technology to lead the appearance of replication‐based assemblers The top‐down fabrication process, or micro machining, provides numbers of nanometer structures at once On the other hand, the bottom‐up fabrication process, or chemical synthesis such as self‐assembly [2] , also provides numerous nanometer structures In fact, both approaches reach nanometer scale withthe limitations ofphysical/chemical aspects atpresent Hence,the technology to fillits gap is considered to be one of the important at this moment for micro‐nano mechatronics Especially, current research directions are mainly two flows, "green innovation" and "life innovation" as depicted in Figure 4 These innovations will be achieved in various research and

developments Table 1 and 2 show the challenging issues by categorized fields.

**2. Micromechatronics for industrial and research applications**

In micro scale, the important technologies are Micro Machine, Micro Mechatronics, Micro Fabrication and Assembly for micromechatronics Recently, borderless applications are investigated such as Micro Biology, Wet Mechatronics, Micro Total Analysis System, Micro Medical Engineering, and Regenerative Medical Engineering Some examples of micro devices mainly in research field are micro‐actuator [3] , micro‐ink‐jet head [4] , micro‐force sensor [5] , micro‐tactile sensor[6] , micro‐fuel battery[7] , micro fluidics device[8] , blood vessel simulator

Micro‐Nano Material Technology 

Micro‐Nano Fabrication Technology 

Micro‐Nano Sensing Technology 

**Figure 3.** Required technologies for micro-nano mechatronics

[9] , and so on.

**Figure 1.** Micro-Nano mechatronics

**Figure 2.** Micro-Nano mechatronics for social and industrial demands

assembly technique In between them, "Electrical" applications are placed for delivering or calculating information and so on Since the micro‐nano mechatronics is the composite academic fields, the required technologies are mainly categorized in to basic/middle/high integration levels as depicted in Figure 3.

**Figure 3.** Required technologies for micro-nano mechatronics

assembly technique In between them, "Electrical" applications are placed for delivering or calculating information and so on Since the micro‐nano mechatronics is the composite academic fields, the required technologies are mainly categorized in to basic/middle/high

Micro-Nano Mechatronics — New Trends in Material, Measurement, Control, Manufacturing and Their Applications in

integration levels as depicted in Figure 3.

**Figure 2.** Micro-Nano mechatronics for social and industrial demands

**Figure 1.** Micro-Nano mechatronics

Biomedical Engineering

2

Basically, nanotechnology is placed in the combinations of the top‐down and bottom‐up approaches The possibility to control the structure of matter atom by atom was first discussed by Richard Feynman in 1959 seriously [1] One of the approaches to fill the gap between top‐ down and bottom‐up approaches is "Nanomanipulation", which realizes controlling the position atthe micro/nanometer scale, is considered to be one ofthe promising ways It might be a key technology to lead the appearance of replication‐based assemblers The top‐down fabrication process, or micro machining, provides numbers of nanometer structures at once On the other hand, the bottom‐up fabrication process, or chemical synthesis such as self‐assembly [2] , also provides numerous nanometer structures In fact, both approaches reach nanometer scale withthe limitations ofphysical/chemical aspects atpresent Hence,the technology to fillits gap is considered to be one of the important at this moment for micro‐nano mechatronics Especially, current research directions are mainly two flows, "green innovation" and "life innovation" as depicted in Figure 4 These innovations will be achieved in various research and developments Table 1 and 2 show the challenging issues by categorized fields.
