**4. Research on center for micro‐nano mechatronics in Graduate School of Engineering, Nagoya University**

We established a ʺCenter for Micro‐nano Mechatronicsʺ at Graduate School of Engineering, Nagoya University in 2008 with the aim of applying nanotechnology to practical systems in micro‐nano scale from a system approach viewpoint [26] Our Center strives to foster "young researchers who dare to challenge unexploited fields" by building a novel interdisciplinary field based on micro‐nano mechatronics This field will promote "the world‐highest‐level of micro‐nano mechatronics research with an emphasis on originality" from a viewpoint of not only the acquisition of advanced technology, but also social issues.

Our center aims not only to create novel functional materials and advanced mechatronics, but also to discover breakthroughs in next‐generation medicine we promote researches in four basic fields, Nano control engineering, Nano measurement engineering, Nano design and manufacturing, and Nano materials science and conduct an applied research encompassing all these basic research fields to attend to the needs of the advanced medical engineering.

devices to evaluate the surgical operations and other applications such as drug delivery

Micro-Nano Mechatronics — New Trends in Material, Measurement, Control, Manufacturing and Their Applications in

In nano scale,the importanttechnologies are Nano‐measurement, Nano‐fabrication and Nano‐ assembly for nanomechatronics The advanced applications are investigated for quantum dots [10] , quantum processing [11] , photonic crystal [12] , drug delivery system (DDS) [13] , field emission display [14], nano‐field emission electron source [15], nano‐X‐ray sources [16], nano‐ actuator[17] , nano‐temperature sensor[18] , nano‐IR sensor[19] , super‐molecules for solar

The wide scale controlled devices from atomic scale to meter scale is expected to realize in the near future For the high integrated, miniaturized, and functionalized NEMS, one of the effective ways is to use the bottom‐up fabricated nanostructures or nanomaterials directly As typical example, the nanodevices are investigated based on the carbon nanotubes (CNTs) It has interesting mechanical, electronic and chemical properties which have been under investigation in various studies [21] There is possibility to use their fine structures directly For example, "telescoping carbon nanotube", which is fabricated by peeling off the outer layers of multi‐walled carbon nanotubes (MWNTs), is one of the most interest nanostructures As previous works, the pulling out of the inner core was pulled out mechanically inside a TEM [22] The MWNTs were used them as the rotation axis of silicon chip as rotational actuators [23].We reported on the direct measurements of electrostatic actuation of a telescoping MWNT inside SEM and TEM [17] [24] [25] Those applications are newly developed using the bottom‐

**4. Research on center for micro‐nano mechatronics in Graduate School of**

We established a ʺCenter for Micro‐nano Mechatronicsʺ at Graduate School of Engineering, Nagoya University in 2008 with the aim of applying nanotechnology to practical systems in micro‐nano scale from a system approach viewpoint [26] Our Center strives to foster "young researchers who dare to challenge unexploited fields" by building a novel interdisciplinary field based on micro‐nano mechatronics This field will promote "the world‐highest‐level of micro‐nano mechatronics research with an emphasis on originality" from a viewpoint of not

Our center aims not only to create novel functional materials and advanced mechatronics, but also to discover breakthroughs in next‐generation medicine we promote researches in four

only the acquisition of advanced technology, but also social issues.

**3. Nanomechatronics for industrial and research application**

system.

6

Biomedical Engineering

energy conversion [20] , and so on.

up structures of CNTs.

**Engineering, Nagoya University**

Our center implements a strategy to realize applications of micro‐nano mechatronics, which are based on mechanical engineering or materials science, control systems engineering, and advanced medical engineering As shown in Figure 6, by establishing joint research and international collaborations between the above research fields, we are creating the most advanced micro‐nano mechatronics and train researchers who can comprehend industrial circles and social issues using an open cluster system as well as conduct research to solve problems spanning these four basic fields In particular, we will initially focus on tasks in the bio‐ or medical welfare technologies using a number of unexploited fields, which may consequently produce venture enterprises Some research results are figured as shown in Figure 7 in the four basic research fields Detail information or more recentresults will be given by the following chapters in this book.

**Figure 6.** Milestone of Micro-Nano mechatronics research fields

**5. Conclusion**

applications.

**Author details**

Toshio Fukuda1

Nagoya, Japan

**References**

ence 1960;23 22‐36.

2407‐2409.

825‐829.

5786‐5790.

tuators A 2006;126 1‐6.

This chapter presents the brief introduction of research and technology on micro‐nano mechatronics For industrial applications, various devices are developed and available, such as applications to the automobiles, computer peripheries, amusements, printers, cameras, robotics automation, environmental monitoring, biological/medical treatments, energy resource, and so on Those devices are investigated based on the micro‐and nano‐mechatronics technologies to realize high‐efficiency, high‐integration, high‐functionality, low‐energy consumption, low‐cost, miniature, and so on Micro‐nano mechatronics technologies can be applied to break though the advanced industrial field including the nanobiology and medical

Research and Technology on Micro-Nano Mechatronics 9

, Masahiro Nakajima2 and Masaru Kojima1

1 Department of Micro‐Nano Systems Engineering, Nagoya University, Nagoya, Japan

2 Graduate School of Engineering Center For Micro‐nano Mechatronics, Nagoya University,

[1] Feynman R. P. Thereʹs Plenty of Room at the Bottom. Caltechʹs Engineering and Sci‐

[2] Whitesides G. M, Grzybowski B. Self‐Assembly at All Scales. Science 2002;295

[3] Kanno I, Tazawa Y, Suzuki T, Kotera H. Piezoelectric unimorph miroactuators with X‐shaped structure composed of PZT thin film. Microsystem Technologies 2007;13(8)

[4] Ishida Y, Hakiai K, Baba A, Asano T. Electrostatic Inkjet Patterning Using Si Needle Prepared by Anodization. Japanese Journal of Applied Physics 2005;44(7B)

[5] Sun Y, Nelson B. J. MEMS Capacitive Force Sensors for Cellular and Flight Biome‐

[6] Motoo K, Arai F, Fukuda T, Katsuragi T, Itoigawa K. High sensitive touch sensor with piezoelectric thin film for pipetting works under microscope. Sensors and Ac‐

chanics. Biomedical Materials 2007;2(1) 16‐22.

**Figure 7.** Examples of research results of micro-nano mechatronics from the center for micro-nano mechatronics of Nagoya University
