**3. Nanomechatronics for industrial and research application**

In nano scale,the importanttechnologies are Nano‐measurement, Nano‐fabrication and Nano‐ assembly for nanomechatronics The advanced applications are investigated for quantum dots [10] , quantum processing [11] , photonic crystal [12] , drug delivery system (DDS) [13] , field emission display [14], nano‐field emission electron source [15], nano‐X‐ray sources [16], nano‐ actuator[17] , nano‐temperature sensor[18] , nano‐IR sensor[19] , super‐molecules for solar energy conversion [20] , and so on.

The wide scale controlled devices from atomic scale to meter scale is expected to realize in the near future For the high integrated, miniaturized, and functionalized NEMS, one of the effective ways is to use the bottom‐up fabricated nanostructures or nanomaterials directly As typical example, the nanodevices are investigated based on the carbon nanotubes (CNTs) It has interesting mechanical, electronic and chemical properties which have been under investigation in various studies [21] There is possibility to use their fine structures directly For example, "telescoping carbon nanotube", which is fabricated by peeling off the outer layers of multi‐walled carbon nanotubes (MWNTs), is one of the most interest nanostructures As previous works, the pulling out of the inner core was pulled out mechanically inside a TEM [22] The MWNTs were used them as the rotation axis of silicon chip as rotational actuators [23].We reported on the direct measurements of electrostatic actuation of a telescoping MWNT inside SEM and TEM [17] [24] [25] Those applications are newly developed using the bottom‐ up structures of CNTs.
