**5. Conclusion**

This chapter presents the brief introduction of research and technology on micro‐nano mechatronics For industrial applications, various devices are developed and available, such as applications to the automobiles, computer peripheries, amusements, printers, cameras, robotics automation, environmental monitoring, biological/medical treatments, energy resource, and so on Those devices are investigated based on the micro‐and nano‐mechatronics technologies to realize high‐efficiency, high‐integration, high‐functionality, low‐energy consumption, low‐cost, miniature, and so on Micro‐nano mechatronics technologies can be applied to break though the advanced industrial field including the nanobiology and medical applications.
