**Meet the editor**

Dr. Bo Cui received his BS in physics from Peking University, China, in 1994. After two years of graduate study in the same department, he moved to the University of Minnesota, and then to Princeton University in 1998, where he earned his Master's degree in 2000 and PhD in 2003, from the Nanostructure Laboratory, Department of Electrical Engineering. After completing

his PhD, he joined the National Research Council of Canada, Industrial Materials Institute in Montreal in 2003 as a staff scientist. Dr. Bo Cui joined the Department of Electrical and Computer Engineering, University of Waterloo, in 2008 as an Assistant Professor, and currently he leads the Waterloo Nanofabrication Group, with a research focus on the development of nanofabrication technologies and applications.

Contents

**Preface XI** 

Sumio Hosaka

Chapter 1 **Electron Beam Lithography for** 

Chapter 3 **Atom Lithography: Fabricating** 

Zengming Zhang

Makoto Sugihara

Chapter 6 **Ultrafast Fabrication of** 

Bo Cui

Chapter 2 **Focused Ion Beam Lithography 27** 

Chapter 4 **Character Projection Lithography for** 

**Part 1 Electron and Ion Beam Lithography 1** 

Heinz D. Wanzenboeck and Simon Waid

Jianwu Zhang, Zhongping Wang and

Jeehong Yang and Serap A. Savari

**Part 2 Nanoimprint and Soft Lithography 111** 

Chapter 7 **Soft UV Nanoimprint Lithography: A Versatile** 

Andrea Cattoni, Jing Chen, Dominique Decanini, Jian Shi and Anne-Marie Haghiri-Gosnet

**Application-Specific Integrated Circuits 69** 

Chapter 5 **Transform-Based Lossless Image Compression Algorithm** 

**Fine Dot Arrays with Nanometer-Sized Dot and Pitch 3** 

**Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam 51** 

**for Electron Beam Direct Write Lithography Systems 95** 

**Metal Nanostructures Using Pulsed Laser Melting 113** 

**Tool for Nanostructuration at the 20nm Scale 139** 
