**7. Acknowledgment**

M. Zamfirescu acknowledges the support of the Sectoral Operational Programme Human Resources Development (SOP HRD), financed from European Social Fund and by Romanian Government under the contract number POSDRU/89/1.5/S/63700. M. Ulmeanu acknowledges the financial support of the European Social Fund POSDRU 2007-2013 through the contract POSDRU/89/1.5/S/60746.

### **8. References**


of a small quantity of ablated material from a donor substrate to an acceptor substrate, was

Using self-assembled monolayers of colloidal micro-spheres on glass and metallic thin film substrates, nano-patterning was obtained by ultrashort pulse laser ablation in the nearsurface enhanced laser field irradiation regime. Formation of ordered areas of nano-holes in

Ultrashort pulsed laser micro/nanostructures writing technique could be considered as an alternative to the classical techniques based on photo-lithography. New micro/nanoprocessing technologies can be developed by combining femtosecond laser writing

M. Zamfirescu acknowledges the support of the Sectoral Operational Programme Human Resources Development (SOP HRD), financed from European Social Fund and by Romanian Government under the contract number POSDRU/89/1.5/S/63700. M. Ulmeanu acknowledges the financial support of the European Social Fund POSDRU 2007-2013

Allsop, T.; Dubov, M.; Mezentzev, V. & Bennion, I. (2010). Inscription and characterization

Ams, M.; Marshall, G. D.; Spence, D. J. & Withford, M. J. (2005). Slit beam method for

Balanis, C.A. (1997). *Antenna Theory. Analysis and design*, John Wiley & Sons, Inc., ISBN: 0-

Banks, D. P.; Grivas, C.; Mills, J. D.; Eason, R. W. and Zergioti, I. (2006). Nanodroplets

Barnes, W. L.; Dereux, A. & Ebbesen, T. W. (2003), Surface plasmon subwavelength optics.

Basharin, A.; & Balabukha, N. (2009). The Radiation of Antennas Based on Metamaterial

Becker, EW.; Ehrfeld W.; Hagmann, P.; Maner, A & Munchmeyer, D. (1986). Fabrication

471-59268-4, New York, Chichester, Brisbane, Toronto, Singapore

*Nature*, Vol. 424, (August 2003), pp. 824-830, ISSN 0028-0836

9551179-6-1, 30th Aug. – 04th Sept. 2009, London, UK

of waveguides written into borosilicate glass by a high-repetition-rate femtosecond laser at 800 nm, *Applied Optics*, Vol. 49, No. 10, (1 April 2010), pp. 1938-1950, ISSN

femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses, *Optics Express,* Vol. 13, No. 15, (July 2005), pp. 5676-5681, eISSN 1094-

deposited in microarrays by femtosecond Ti:sapphire laser-induced forward transfer, *Appl. Phys. Lett*., Vol. 89, No. 19, (November 2006) pp. 193107, ISSN 1077-

Waveguides, *Proceedings of 3rd International Congress on Advanced Electromagnetic Materials in Microwaves and Optics, Metamaterials 2009,* pp.224 – 226, ISBN 978-0-

of microstructures with high aspect ratio and great structural heights by synchrotron radiation lithography, galvanoformung and plastic moulding

a multilayer structure was demonstrated by selective near-field laser ablation.

techniques with already proved lithography techniques.

through the contract POSDRU/89/1.5/S/60746.

demonstrated.

**7. Acknowledgment** 

**8. References** 

0003-6935

4087

3118

(LIGA process). *Microelectronic Eng.*, Vol. 4, No.1, (May 1986), pp. 35–36, ISSN 0167-931


Ultrashort Pulsed Lasers – Efficient Tools for Materials Micro-Processing 285

Novotny, L. & Hecht, B. (2006). *Principles of Nano-Optics*, Cambridge University Press, ISBN

Osellame, R.; Taccheo, S.; Marangoni, M.; Ramponi, R.; Laporta P.; Polli, D.; De Silvestri, S.

Ovsianikov, A.; Xiao, S. Z.; Farsari, M.; Vamvakaki, M.; Fotakis, C. & Chichkov, B. N. (2009).

Pavlidis, V. F. and Friedman, E. G. (2009). Three-Dimensional Integrated Circuit Design,

Pendry, J.B. (1999). Magnetism from conductors and enhanced nonlinear phenomena. *IEEE Trans. on MTT*, Vol.47, nr.11, Nov. 1999, pp. 2075-2084, ISSN: 0018-9480 Piglmayer, K.; Denk, R. & Bauerle, D. (2002). Laser-induced surface patterning by means of

Piqué, A.; Mathews, S.A.; Pratap, B.; Auyeung, R.C.Y.; Karns, B.J. & Lakeou, S.

Qi, L.; Nishii, K. & Nambai, Y. (2009). Regular subwavelength surface structures induced by

Rill, M. S.; Plet, C.; Thiel,, M.; Staude, I.; Von Freymenn, G.; Linden, S. & Wegener, M.

Sajin G.; Simion S.; Craciunoiu, F. & Marcelli, R. (2007). Silicon supported microwave

Sajin G.; Simion S.; Craciunoiu Fl.; Bunea, A. C.; Dinescu, A.; Zamfirescu, M.; Neagu, L. &

Sajin, G.; Simion, S.; Craciunoiu, Fl.; Bunea, A. C.; Muller A.A. & Dinescu, A. (2010b).

Sanz, M.; Walczak. M.; Oujja, M.; Domingo, C.; Klini, A.; Papadopoulou, E.L.; Fotakis, C. &

ISSN 1545-827X, Sinaia, Romania, October 11 – 13, 2010.

Morgan Kaufmann, Elsevier Inc., ISBN 978-0-12-374343-5.

& Cerullo, G. (2003). Femtosecond writing of active optical waveguides with astigmatically shaped beams, *Journal of the Optical Society of America B,* Vol. 20, No.

Shrinkage of microstructures produced by two-photon polymerization of Zr-based hybrid photosensitive materials, *Optics Express,* Vol. 17, No. 4, (February 16, 2009),

microspheres. *Applied Physics Letters*, Vol. 80, No. 25, (June 2005), pp. 4693-4695,

(2006) Embedding electronic circuits by laser direct-write, *Microelectronic Engineering*, Vol. 83, No. 11-12, (November-December 2006) pp. 2527–2533,

femtosecond laser pulses on stainless steel, *Optics Letters,* Vol. 34, No. 12, (June 15,

(2008). Photonic metamaterials by direct laser writing and silver chemical vapour deposition, *Nature Materials*, Vol. 7, No. 7, (July 2008), pp. 543-546, ISSN 1476-

zeroth-order resonance antenna on metamaterial approach, *Proceedings of Asia-Pacific Microwave Conference, APMC 2007,* pp. 221 – 224, ISBN 1-4244-0748-6,

Dabu, R. (2010a). Millimeter Wave Metamaterial Band-Pass Filter by Femtosecond Laser Ablation, *Proceedings of European Microwave Conference, EuMC,* ISBN 978-2-87487-015-6, pp. 1393–1396, Paris, France, September 26 – October 01,

Metamaterial Millimeter Wave Directional Coupler on silicon substrate, *Proc. of 33rd International Semiconductor Conference, CAS,* pp. 269–272, ISBN 978-14244-5781-6;

Castillejo, M. (2010), Femtosecond laser deposition of TiO2 by laser induced

978-0-521-83224-3, New York

pp. 2143-2148, eISSN 1094-4087

2009), pp. 1846-1848, ISSN 0146-9592

Bangkok, Thailanda, December 2007

ISSN 0003-6951

ISSN 0167-9317

1122

2010.

7, (July 2003), pp. 1559-1567, ISSN 0740-3224


Gorbunov, A. A. & Pompe, W. (1994). Thin film nanoprocessing by laser/STM

Gwyn, C. W.; Stulen, R.; Sweeney, D. & Attttwood, D. (1998). Extreme ultraviolet

Homoelle, D.; Wielandy, S.; Gaeta, A. L.; Borelli, N. F. & Smith, C. (1999). Infrared

Kurokawa, K. (1965). Power Waves and the Scattering Matrix, *IEEE Trans. on MTT,* Vol.13,

Li, C.; Liu, K.-Y. & Li, F. (2007). Composite right*/*left-handed coplanar waveguide band-pass

Liu, X.; Du, D. & Mourou, G. (1997). Laser Ablation and Micromachining with Ultrashort

Liu, C. & Menzel, W. (2009), On the Relation between Composite Right-/Left-Handed

*and Technology,* Volume 2009, Article ID 184895, DOI:10.1155/2009/184895 Liu, G.; Tian, Y. and Kan., Y. (2005). Fabrication of high-aspect-ratio microstructures using

Maruo, S.; Nakamura, O. & Kawata, S. (1997). Three-dimensional microfabrication with two-

Matei, A.; Zamfirescu, M.; Jipa, F.; Luculescu, C.;Dinescu, M.; Buruiana, EC.; Buruiana,

Menzel, W. (1979). A new traveling-wave antenna in microstrip, *Arch. Electron. Uebertrag.* 

Mie, G. (1908). Beitrage zur Optik trueber Medien, speziell kolloidaler Metallosungen.

Nishiyama, H.; Mizoshiri, M.; Kawahara, T.; Nishii, J. & Hirata, Y. (2008). SiO2- based

*Express,* Vol. 16, No. 22, (27 October 2009), pp. 17288-17294, eISSN 1094-4087 Novotny, L. & Stranick, S. J. (2006). Near-field optical microscopy and spectroscopy with

Vol. 1278, No. 1, (October 2010), pp. 843-851, ISSN 0094-243X

*Annalen der Physik*, Vol. 330, No. 3, pp. 377-445, ISSN 1521-3889

Vol. 24, No. 18, (September 15, 1999), pp. 1311-1313, ISSN 0146-9592 Kawata S., Sun H.-B., Tanaka T., and Takada K. (2001). Finer features for functional

ISSN 0031-8965

0836

1998), pp. 3142-3149, ISSN 0734-211X

March 1965, pp194 – 202, ISSN: 0018-9480

pp. 317–319, ISSN 0003-6951

pp. 1706-1716, ISSN 0018-9197

pp.343–346, ISSN: 1432-1858

1997), pp. 132-134, ISSN 0146-9592

*Tech.,* Vol. 33, 1979, pp. 137 – 140.

*331,* ISSN 0066-426X

combination. *Physica Status Solidi A*, Vol. 145, No. 2, (October 2004), pp. 333-338,

lithography, *Journal of Vacuum Science & Technology B,* Vol. 16, No. 6, (November

photosensitivity in silica glasses exposed to femtosecond laser pulses, *Optics Letters*,

microdevices, *Nature* , Vol. 412, No. 6848, (August 16, 2001) pp. 697-698, ISSN: 0028-

filter using capacitively-coupled zeroth-order resonators, *Appl. Phys. Lett.* Vol. A 87,

Laser Pulses, *IEEE Journal of Quantum Electronics*, Vol. 33, No. 10, (October 1997),

Transmission Lines and Chebyshev Filters, *International Journal of Microwave Science* 

SU8 photoresist, Microsystem Technologies, Vol. 11, No. 3-4, (November 6, 2003),

photon-absorbed photoplymerization, *Optics Letters,* Vol. 22, No. 2, (January 15,

T.;Sima, L.E. & Petrescu, S.M. (2010). Two Photon Polymerization of Ormosils, *AIP Conference Proceedings, International Symposium on High Power Laser Ablation 2010*,

nonplanar structures fabricated using femtosecond laser lithography, *Optics* 

pointed probes. *Annual Review of Physical Chemistry*, Vol. *57*, (May 2006), pp. *303-*


Ultrashort Pulsed Lasers – Efficient Tools for Materials Micro-Processing 287

Vega, F.; Armengol, J.; Diez-Blanco, V.; Siegel, J.; Solis, J.; Barcones, B.; Perez-Rodriguez, A.

Veselago, V. G. (1968). The electrodynamics of substances with simultaneously

Wang, Y. Z.; Zhang, Y. W.; He, L.; Liu, F.-Q.; Li, H. Q. & Chen, H. (2006). Discussion on

Will, M.; Nolte, S.; Chichkov, B. & Tunnermann, A. (2002). Optical properties of waveguides

Witzgall, G.; Vrijen, R.; Yablonovitch, E.; Doan, V. & Schwartz, B. J. (1998). Single-shot two-

Wortmann, D.; Gottmann, J.; Brandt, N. & Horn-Solle, H. (2008). Micro- and nanostructures

Xie, X. S. & Trautman, J. K. (1998). Optical studies of single molecules at room temperature.

Yuanyuan, S.; Yewen, Z.; Fuqiang, L.; Li, H.; Hongqiang, L. & Hong, C. (2007). A novel

Yu, C. C.; Huang, M. H.; Lin, L. K. & Chang, Y. T. (2008). A compact antenna based on

Zhang, S.; Fan, W.; Panoiu, N. C.; Malloy, K. J.; Osgood, R. M. & Brueck, S. R. J. (2005).

*Physical Review Letters*, Vol. 95, 137404 (23 September 2005), ISSN 0031-9007 Ziolkowski, R.W.; Peng, J. & Lin, C. C. (2009). Electrically Small Metamaterial-Inspired

*University - Science A,* Vol. 7, January 2006, pp. 95-98, ISSN 1673-565X Weiß, T.; Hildebrand. G.; Schade, R. & Liefeith K. (2009). Two-Photon polymerization for

*Applied Physics Letters*, Vol. 87, 021109 (2005), ISSN 0003-6951

21, (July 2002), pp. 4360-4364, ISSN 1559-128X

No. 3, (4 February 2008), pp. 1517-1522, eISSN 1094-4087

ISSN 1432-0630

pp. 509-514

2863

0146-9592

426X

0895-2477

China, December 2008

femtosecond laser processing. *Applied Physics A,* DOI:10.1007/s00339-010-6119-9,

& Loza-Alvarez, P. (2005). Mechanisms of refractive index modification during femtosecond laser writing of waveguides in alkaline lead-oxide silicate glass,

negative values of ε and μ, *Sov. Physics – Usp.*, vol.47, January-February 1968,

coupling mechanism of asymmetric CRLH/RH TL coupler, *Journal of Zhejiang* 

microfabrication of three-dimensional scaffolds for tissue engineering application, Engineering in Life Sciences Vol. 9, No. 5, (October 2009), pp. 384–390, ISSN 1618-

fabricated in fused silica by femtosecond laser pulses, *Applied Optics*, Vol. 41, No.

photon exposure of commercial photoiresisit for the production of threedimensional structures, *Optics Letters,* Vol. 23, No. 22, (November 15, 1998), ISSN

inside sapphire by fs-laser irradiation and selective etching, *Optics Express*, Vol. 16,

*Annual Review of Physical Chemistry*, Vol. 49, (October 1998), pp. 441–480, ISSN 0066-

filter based on zeroth-order resonance by means of CRLH transmission line, *Microwave and Optical Technology Letters,* Vol. 49, Issue 5, pp. 1015 – 1018, ISSN:

metamaterial for WiMAX, *Proceedings of Asia-Pacific Microwave Conference,APMC 2008,* Paper J2-05, ISBN 978-1-4244-2642-3, Hong Kong,

Experimental Demonstration of Near-Infrared Negative-Index Metamaterials,

Antennas: The Next Generation, *Proceedings of 3rd International Congress on Advanced Electromagnetic Materials in Microwaves and Optics, Metamaterials* 

forward transfer, *Thin Solid Films*, Vol. 518, No. 19, (July 2010) pp. 5525–5529, ISSN 0040-6090


Seongmin, P.; Baik, J. W.; Cho, S. H. & Kim, Y. S. (2008). A metamaterial-based symmetrical

Shelby R.A.; Smith D.R. & Schultz S. (2001). Experimental verification of a negative index of

Sowa, S.; Watanabe, W.; Tamaki, T.; Nishii, J. & Itoh, K. (2005). Symmetric waveguides in

Streltsov, A. M. & Borrelli, N. F. (2001). Fabrication and analysis of a directional coupler

Stuart, B. C.; Feit, M. D.; Herman, S.; Rubenchick, A. M.; Shore, B. W. & Perry,

Sugioka, K.; Meunier, M. & Pique, A. (2010). *Laser Precision Microfabrication*, Springer Series

Takeshima, N.; Kuroiwa, Y.; Narita, Y.; Tanaka, S. & Hirao, K. (2004). Fabrication of a

Takeshima, N.; Nartita, Y.; Nagata, T. & Tanaka, S. (2005). Fabrication of photonic

Tan, D.; Li ,Y.; Qi, F.; Yang, H.; Gong Q.; Dong, X. & Duan X. (2007). Reduction in feature

Thomas, B.; Alloncle, A. P.; Delaporte, P.; Sentis, M.; Sanaur, S.; Barret, M. & Collot, P.

Ulmeanu, M.; Zamfirescu, M.; Rusen, L.; Luculescu, C.; Moldovan, A. ; Stratan, A. & Dabu,

Ulmeanu, M.; Zamfirescu, M. & Medianu, R., (2009b). Self-assembly of colloidal particles on

Ulmeanu, M.; Filipescu, M.; Scarisoreanu, N.D.; Georgescu, G.; Rusen, L. & Zamfirescu, M.

refraction, *Science,* vol. 292, (April 2001), pp. 77–79, ISSN: 0036-8075

Vol. 14, No. 1, (9 January 2006), pp. 291-297, eISSN 1094-4087

(January 1, 2001), pp. 2023-2025, ISSN 0146-9592

(January 13, 2007) pp. 071106 1-3 , ISSN 1077-3118

(December 2009) pp.114908 - 114908-8, ISSN 0021-8979

Vol. 338, No. 1-3, (April 2009), pp. 87-92, ISSN 0927-7757

0040-6090

2008.

0740-3224

10523-4

4087

0146-9592

ISSN 0169-4332

forward transfer, *Thin Solid Films*, Vol. 518, No. 19, (July 2010) pp. 5525–5529, ISSN

periodic antenna with efficiency enhancement, *Proceedings of Asia-Pacific Microwave Conference,* Paper A3-49, ISBN 978-1-4244-2642-3, Hong Kong, China, December

poly(methyl methacrylate) fabricated by femtosecond laser pulses, *Optics Express*,

written in glass by nanojoule femtosecond laser pulses, *Optics Letters*, Vol. 21, No. 1,

M. D. (1996). Optical ablation by high-power short-pulse lasers, *Journal of the Optical Society of America B,* Vol. 13, No. 2, (February 1996), pp. 459-468, ISSN

in Materials Science, Vol. 135, Springer\_Verlag Berlin Heidelberg, ISBN 978-3-642-

periodic structure with a high refractive-index difference by femtosecond laser pulses, *Optics Express*, Vol.12, No. 17, (23 August 2004), pp. 4019-4024, eISSN 1094-

crystals in ZnS-doped glass, *Optics Letters,* Vol. 30, No. 5, (March 1, 2005), ISSN

size of two-photon polymerization using SCR500, Appl. Phys. Lett. Vol. 90,

(2007). Experimental investigations of laser-induced forward transfer process of organic thin films, *App. Surf. Sci*., Vol. 254, No. 4, (December 2007) pp. 1206-1210,

R. (2009a). Structuring by field enhancement of glass, Ag, Au, and Co thin films using short pulse laser ablation. *Journal of Applied Physics*, Vol. 106, No.11,

different surfaces. *Colloids and Surfaces A: Physicochemical and Engineering Aspects*,

(2010). Selective removal and patterning of a Co/Cu/Co trilayer created by

femtosecond laser processing. *Applied Physics A,* DOI:10.1007/s00339-010-6119-9, ISSN 1432-0630


**15** 

*Italy* 

**Laser-Based Lithography for Polymeric** 

*Istituto Italiano di Tecnologia (IIT), Via Barsanti, 73010 Arnesano, Lecce* 

In recent years, the synthesis of polymeric nanocomposites has gained much interest in the scientific community thanks to their unique capability to combine the properties of the host polymer matrices, such as toughness, elasticity, processability, solubility, thermal stability, etc, with those of inorganic nanoparticles (NPs), such as hardness, chemical resistance, optical and electronic properties. Among a variety of nanofillers, semiconductor and metallic NPs are extensively studied and used, because of their unique properties especially in the nanoscale. In this work we deal with polymeric nanocomposites incorporating various nanofillers, each one of them having extremely attractive properties for technological applications. In particular we focus on titanium dioxide (TiO2) NPs due to their unique reversible wettability, iron oxide (Fe2O3) NPs due to their superparamagnetic nature, gold (Au) NPs due to their enhanced electronic conductivity, and cadmium sulphide

Nanocomposite materials are usually prepared by simple blending of the nanosized inorganic components into polymer solutions. Nevertheless, this method quite often leads to formation of aggregates or macroscopic phase separation, since the control of the dispersion and distribution of the nanofillers within the organic matrices is impossible. To obtain a higher compatibility between the filler and the host polymeric material, and achieve coatings with high content of inorganic particles, the use of polymerization techniques is widely adopted (Fouassier 1995, Decker et al 2005, Lee et al 2006, Wang & Ni 2008). From this point of view, several methods can be considered, depending on the type of monomers and nanomaterials, such as bulk polymerization, photoinitiated polymerization, emulsion polymerization, in situ thermal polymerization, or copolymerization in solution. Among them, the use of ultraviolet (UV) light in combination with proper photoinitiators to produce polymeric nanocomposite films is one of the most rapid and effective method, the

Patterning of nanocomposites using UV polymerization, the so-called UV photolithography is ideal for the direct incorporation of nanocomposites into specific parts of systems and devices. Photolithographically prepared nanocomposite structures can be used for the selective deposition of molecules, which have specific affinity to the photopolymerized

(CdS) NPs due to their tuned photoemission in the quantum size regime.

main advantage being the creation of well defined patterned structures.

**1. Introduction** 

Francesca Villafiorita Monteleone, Athanasios Milionis, Fabrizio Spano, Ilker Bayer and Roberto Cingolani

**Nanocomposite Structures** 

Athanassia Athanassiou, Despina Fragouli,

*Center for Biomolecular Nanotechnologies @UNILE,* 

*2009,* pp.44 – 46, ISBN 978-0-9551179-6-1, 30th Aug. – 04th Sept. 2009, London, UK

Zoubir, A.; Richardson, M.; Rivero, C.; Schulte, A.; Lopez, C.; Richardson, K; Ho, N & Vallee, R. (2004). Direct femtosecond laser writing of waveguides in As2S3 thin films, *Optics Letters*, Vol. 29, No. 7, (April 1, 2004), pp. 748-750, ISSN 0146- 9592
