**5. Conclusion**

In this chapter, we introduced the chemical conversion of functional groups on the organic monolayer by electrochemical SPL. The three-dimensional nanostructures of silicon oxide were successfully fabricated by decomposing the 1-decane monolayer and subsequent oxidizing the hydrogen-terminated Si surfaces via anodization SPL. The size and reproducibility of oxide nanoline structures were greatly dependent on the sorts of probes for anodization SPL. In the case of Au-coated Si and uncoated Si probes, the obtained nanoline structures were changed with the scanning rates and the applied bias voltages. On the other hand, the nanotexture fabrication using the diamond-coated probe showed one of the finest structures (15 nm nanoline) and highly reproducibility even though any fabrication conditions such as scanning rate and applied bias voltage are used in the anodization SPL.The amino surface on SAM was oxidized and converted into a nitroso surface at bias voltages of 0.5 to 3 V. The functional groups on APhS SAM were reversibly converted by controlling the applied bias voltage. It was also demonstrated that the surface-potential memory was based on surface potential reversibility. In addition, the vinyl-terminated groups of the OD monolayer were site-selectively oxidized and chemically converted into carboxyl groups at bias voltages of 1 to 2 V. OD molecules on the sample surface were decomposed and silicon oxide was formed at bias voltages greater than 3 V. On the other hand, CH2-terminal groups were converted into

Scanning Probe Lithography on Organic Monolayers 503

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cyclobutane rings at bias voltages of less than −1.5 V. Recently, the research into applications of SAMs has progressed rapidly because of their ability to modify surfaces functionally and provide hydrophobicity, hydrophilicity, or biocompatibility. However, the reproducibility of the formation of SAMs is difficult. In this chapter, the formation mechanism of SAMs has been studied for high reproducibility. The control of surface properties by fabrication of micro/nanosized domains composed of SAMs is expected to be applied in the field of biomaterials. In addition, electrochemical SPL is also expected to be applied to various devices.
