**3. Electrochemical scanning probe lithography on organic monolayer**

A future tool of nanolithography may be nanopattern drawing based on SPM. Several reports describe SPL in which a sample surface is chemically converted or mechanically deformed at the probe-sample junction. The characteristic feature of all these methods is that they allow permanent nanopatterns to be drawn on the substrate. Scanning probe electrochemistry in which materials surfaces locally oxidized or reduced by a tip of SPM is a promising technique for constructing nanostructures consisting of organic molecules. This electrochemical SPL is performed through water column which is condensed between the tip of SPM and the substrate surface. This water column can be used as a microscopic electrochemical cell. When the bias voltage is applied, redox reaction proceeds on the substrate surface. The method is expected as a key technology for future molecular nanodevices. In addition, organosilane SAMs have been applied to a resist material for SPL.

Fig. 6. Topographic images of line structure fabricated by (a) diamond coated Si tip, (b) Si tip and (c) Au coated Si tip, respectively. The applied bias voltage and scanning rate are 7 V and 1m/s, respectively. [SH. Lee, N. Saito, O. Takai, Highly reproducible technique for threedimensional nanostructure fabrication via anodization scanning probe lithography, Appl.

A future tool of nanolithography may be nanopattern drawing based on SPM. Several reports describe SPL in which a sample surface is chemically converted or mechanically deformed at the probe-sample junction. The characteristic feature of all these methods is that they allow permanent nanopatterns to be drawn on the substrate. Scanning probe electrochemistry in which materials surfaces locally oxidized or reduced by a tip of SPM is a promising technique for constructing nanostructures consisting of organic molecules. This electrochemical SPL is performed through water column which is condensed between the tip of SPM and the substrate surface. This water column can be used as a microscopic electrochemical cell. When the bias voltage is applied, redox reaction proceeds on the substrate surface. The method is expected as a key technology for future molecular nanodevices. In addition, organosilane SAMs have been applied to a resist material for SPL.

**3. Electrochemical scanning probe lithography on organic monolayer** 

Surf. Sci., 255, 7302-7306 (2009). Copyright@ELSEVIER (2009)]
