**Preface** XIII

	- **Part 2 Nanoimprint and Soft Lithography 111**

X Contents


Contents VII

**Part 4 EUV Lithography and Resolution Enhancement Techniques 351** 

Chapter 20 **High-Index Immersion Lithography 397** 

Chapter 21 **Double Patterning for Memory ICs 417**  Christoph Ludwig and Steffen Meyer

Chapter 22 **Diffraction Based Overlay Metrology for** 

Jiangtao Hu, Nigel Smith and

**Part 5 Other Lithographic Technologies:**

**Scanning Probe Microscope 457**  S. Sadegh Hassani and H. R. Aghabozorg

SunHyung Lee, Takahiro Ishizaki, Katsuya Teshima, Nagahiro Saito and

Chapter 24 **Scanning Probe Lithography on Organic Monolayers 475** 

Chapter 25 **Controlled Fabrication of Noble Metal Nanomaterials via** 

**Nanopatterning via Nanosphere Lithography 533** 

**Fabrication for Printed Electronics Applications 547** 

**Nanosphere Lithography and Their Optical Properties 505** 

Prasad Dasari, Jie Li,

Chapter 23 **Nanolithography Study Using** 

Osamu Takai

Yujun Song

Chapter 26 **A Feasible Routine for Large-Scale** 

Yiwei Sun and Jie Lin

Zhenyang Zhong, Tong Zhou,

Chapter 27 **Electrohydrodynamic Inkjet – Micro Pattern** 

Kyung-Hyun Choi, Khalid Rahman, Nauman Malik Muhammad, Arshad Khan, Ki-Rin Kwon, Yang-Hoi Doh and Hyung-Chan Kim

Oleg Kritsun

**Double Patterning Technologies 433** 

**Scanning Probe, Nanosphere, Inkjet Printing, etc. 455** 

**Source Incorporating a Cryogenic Xe Target 353** 

**Nanolithography Collector Mirrors 369** 

Chapter 18 **Laser-Plasma Extreme Ultraviolet** 

Sho Amano

J.P. Allain

Keita Sakai

Chapter 19 **Irradiation Effects on EUV** 


VI Contents

Chapter 8 **Repairing Nanoimprint Mold Defects by**

Makoto Okada and Shinji Matsui

Chapter 9 **Improving the Light-Emitting Efficiency of**

Chapter 10 **Fabrication of Circular Grating Distributed** 

Chapter 11 **Application of Nanoimprint Lithography** 

Masaki Yanagisawa

Chapter 12 **Guided-Mode Resonance Filters** 

Kyu J. Lee, Jungho Jin,

Chapter 13 **DUV Interferometry for** 

Chapter 14 **Ultrashort Pulsed Lasers –** 

Chapter 15 **Laser-Based Lithography for** 

Chapter 16 **Fabrication of 3-D Structures**

Max Q.-H. Meng

Chapter 17 **Emerging Maskless Nanolithography** 

Yeeu-Chang Lee and Sheng-Han Tu

**Focused-Ion-Beam Etching and Deposition 157** 

**GaN LEDs Using Nanoimprint Lithography 173** 

**to Distributed Feedback Laser Diodes 211** 

**Fabricated with Soft Lithography 225** 

**Micro and Nanopatterned Surfaces 243**  Olivier Soppera, Ali Dirani, Fabrice Stehlin, Hassan Ridaoui, Arnaud Spangenberg, Fernand Wieder and Vincent Roucoules

Marian Zamfirescu, Magdalena Ulmeanu, Alina Bunea, Gheorghe Sajin and Razvan Dabu

**Polymeric Nanocomposite Structures 289** Athanassia Athanassiou, Despina Fragouli,

Mitsuhiro Horade and Susumu Sugiyama

**Based on Novel Diffraction Gratings 335** Guanxiao Cheng, Yong Yang, Chao Hu, Ping Xu, Helun Song, Tingwen Xing and

**Part 3 Interference, Two-Photon, UV and X-Ray Lithography 241** 

**Efficient Tools for Materials Micro-Processing 261** 

Francesca Villafiorita Monteleone, Athanasios Milionis, Fabrizio Spano, Ilker Bayer and Roberto Cingolani

**Utilizing Synchrotron Radiation Lithography 315** 

Byeong-Soo Bae and Robert Magnusson

**Feedback Dye Laser by Nanoimprint Lithography 197**  Yan Chen, Zhenyu Li, Zhaoyu Zhang and Axel Scherer

Chapter 28 **Lithography-Free Nanostructure Fabrication Techniques Utilizing Thin-Film Edges 569**  Hideo Kaiju, Kenji Kondo and Akira Ishibashi

#### Chapter 29 **Extremely Wetting Pattern by Photocatalytic Lithography and Its Application 591**  Yuekun Lai, Changjian Lin and Zhong Chen
