**ADVANCES IN MICRO/ NANO ELECTROMECHANICAL SYSTEMS AND FABRICATION TECHNOLOGIES**

Edited by **Kenichi Takahata**

### **Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies**

http://dx.doi.org/10.5772/46117 Edited by Kenichi Takahata

### **Contributors**

Tuhin Subhra Santra, Fang Tseng, Ivanka Stanimirović, Zdravko Stanimirović, Artin Petrossians, Kwun Nam Hui, Kwan San Hui, Norihisa Miki, Gunasekaran Venugopal, Sang Jae Kim, Hamed Sadeghian, Fred Van Keulen, Hans Goosen, John Ojur Dennis, Farooq Ahmad, Damien Rodger, Yu-Chong Tai, Wen Li, James Weiland, Mark Humayun

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### **Notice**

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First published in Croatia, 2013 by INTECH d.o.o. eBook (PDF) Published by IN TECH d.o.o. Place and year of publication of eBook (PDF): Rijeka, 2019. IntechOpen is the global imprint of IN TECH d.o.o. Printed in Croatia

Legal deposit, Croatia: National and University Library in Zagreb

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Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies Edited by Kenichi Takahata p. cm. ISBN 978-953-51-1085-9 eBook (PDF) ISBN 978-953-51-6344-2
