**4. Conclusion**

In conclusion, the complete nanolithographic processes which include introduction, resists and masks, Photon-based lithography, electron beam lithography, ion beam lithography and emerging nanolithographic techniques like the alternate nanolithography techniques Microcontact printing, Nanoimprint Lithography, Scanned Probe Lithography, Dip-pen Lithogra‐ phy were briefly discussed in this chapter. As a conclusion, the following table can presents the complete scenerio of the nanolithographic process.


**Table 2.** Comparison of results between conventional and Nanolithographic methods
