1. Introduction

In the last decade, there has been a tremendous development in the field of miniaturization of chemical and biochemical sensor devices. Microelectromechanical systems (MEMS) refer to microscopic devices that have a characteristic length of less than 1 mm but more than 100 nm and combine electrical and mechanical components. Nanoelectromechanical systems (NEMS) refer to nanoscopic devices that have a characteristic length of less than 100 nm and combine electrical and mechanical components. In mesoscale devices, if the functional components are on micro- or nanoscale, they may be referred to as MEMS or NEMS, respectively. These are referred to as an intelligent miniaturized system comprising sensing, processing, and/or actuating functions and combine electrical and mechanical components. The acronym MEMS originated in the USA. The term commonly used in Europe is micro system technology (MST) and in Japan, the term is micromachines. Another term generally used is micro/nanodevices.

MEMS/NEMS terms are also now used in a broad sense and include electrical, mechanical, fluidic, optical, and/or biological functions. MEMS/NEMS for optications are refer red to as micro/nano optoelectromechanical systems (MOEMS/NOEMS). MEMS/NEMS for electronic applications are referred to as radio-frequency-MEMS/NEMS or RF-MEMS/RF-NEMS. MEMS/NEMS for biological applications are referred to as BioMEMS/BioNEMS. MEMS and emerging NEMS are expected to have a major impact on our lives, comparable to that of semiconductor technology, information technology, or cellular and molecular biology. MEMS/NEMS are used in electromechanical, electronics, information/communication, chemical, and biological applications [1]. To put the dimensions of MEMS and NEMS in perspective refer to Fig.1.

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MEMS/NEMS need to be designed to perform expected functions in short durations, typically in the millisecond to picosecond range. Through MEMS it is possible to incorporate micro-scale types of devices such as motors, fluidic channels, sample preparation (including mixing or vaporization) chambers, and various types of sensors (including optical sensors) that will perform assorted tasks, such as monitoring. Again, one can do both monitoring in the physical sense and the chemical sense. SiC has been known for its outstanding mechanical and chemical properties making it equally attractive for MEMS and NEMS.

Figure 1. Dimensions of MEMS and NEMS in perspective. MEMS/NEMS examples shown are of a vertical single walled carbon nanotube (SWCNT) transistor (5 nm wide and 15 nm high), of molecular dynamic simulations of a carbonnanotube based gear, quantum-dot transistor obtained from van der Wiel et al., and DMD obtained from www.dlp.com.

An ever-increasing demand for biomedical devices provides motivation for the development of advanced semiconducting materials for challenging applications ranging from disease detection to organ function restoration. The superior bioelectrical properties of silicon carbide (SiC) make it an ideal substrate for bioelectrodes thus allowing for an all-biocompatible, non-metalic biomedical system. Most of the studies conducted in the past on singlecrystal SiC provide evidence of the attractive bio-potentialities of this material and hence suggest similar properties for crystalline SiC.

Recent interest has risen in employing these materials, tools and technologies for the fabrication of miniature sensors and actuators and their integration with electronic circuits to produce smart devices and systems. This effort offers the promise of: (1) increasing the performance and manufacturability of both sensors and actuators by exploiting new batch fabrication processes developed including micro stereo lithographic and micro molding techniques; (2) developing novel classes of materials and mechanical structures not possible previously, such as diamond-like carbon, silicon carbide and carbon nanotubes, micro-turbines and micro-engines; (3) development of technologies for the system level and wafer level integration of micro components at the nanometer precision, such as self-assembly techniques and robotic manipulation; (4) development of control and communication systems for MEMS, such as optical and wireless radio frequency, and power delivery systems, etc. The integration of MEMS, interdigital transducers and required microelectronics and conformal antenna in the multifunctional smart materials and composites results in a smart system suitable for sending and control of a variety of functions in automobile, aerospace, marine and civil strutures and food and medical industries. The principle aim of this chapter is to present an overview of bioMEMS and bioNEMS technologies that utilize SiC as a key component in the structure. Therefore, this chapter focuses on reviewing examples where SiC is used in the mechanical components of micro /nanotabricated devices and b10sensors for biomedical applications that can be used to further develop the technology.
