Acknowledgements

We would like to thank the Microfabrication Laboratory of the Brazilian Synchrotron Light Laboratory (LMF-LNLS) for the support in the development of the devices and sensors, Center of Semiconductor Components (CCS-UNICAMP) for the support in the characterization of the SiC films and the Electronics Laboratory of the Department of Precision Mechanical of the Faculty of Technology of Sao Paulo (FATEC-SP) for the support in the testing of the devices and sensors. This work was supported by FAPESP-MCT/CNPq-PRONEX (process nº 2011/50773-0).
