**Meet the editor**

Sumio Hosaka was born in Japan in 1948. He received the Ph. D. degree in Engineering from Waseda University, Tokyo, in 1983. He joined the Hitachi Central Research Lab. (HCRL), Co. Ltd. Kokubunji, Tokyo in 1971, working in semiconductor lithography using electron, ion and light beams, nano-metrology using electron beam microscopy and scanning probe microscopy (SPM)

techniques, in HCRL and terabyte huge storage using SPM in the Hitachi Advanced Research Lab. (HARL). After he joined the Hitachi Kenki Co., Tsuchiura, Ibaraki in 2000, working in-line atomic force microscope products based on his invention of first optical lever type atomic force microscope at 1987, he joined to department of electronic engineering, Gunma University, Kiryu, Gunma, in 2001. Today, he works in division of electronics and informatics, faculty of science and technology in Gunma University. Since 2001, he has been professor in the university, and is working on nano devices such as quantum conductance atomic switch (QCAS) and phase change memory, nano lithography and fabrication such as EB drawing, self-assembled nano dot arrays and patterned media in huge magnetic storage, and nano metrology based on atomic force controlling, near-field light, Raman spectroscopy and polarized light image in SPM applications.

Contents

**Preface VII**

Chapter 1 **Colloidal Lithography 3**

Olivier Soppera

**Materials 65**

Razvan Dabu

**Section 2 Resist 145**

**Wetting Control 123**

Chapter 6 **Resist Homogeneity 147** Nima Arjmandi

Ye Yu and Gang Zhang

**Section 1 Lithography for 3D Structure and Nano Scale 1**

Chapter 2 **Recent Advances in Two-Photon Stereolithography 35**

Chapter 3 **Femtosecond Laser Lithography in Organic and Non-Organic**

Chapter 4 **Three-Dimensional Lithography Using Combination of**

Noritaka Kawasegi and Noboru Morita

Brandi and Athanassia Athanassiou

Arnaud Spangenberg, Nelly Hobeika, Fabrice Stehlin, Jean-Pierre Malval, Fernand Wieder, Prem Prabhakaran, Patrice Baldeck and

Florin Jipa, Marian Zamfirescu, Alin Velea, Mihai Popescu and

**Nanoscale Processing and Wet Chemical Etching 95**

Chapter 5 **Combination of Lithography and Coating Methods for Surface**

Athanasios Milionis, Ilker S. Bayer, Despina Fragouli, Fernando
