**Fabrication of the Hydrogenated Amorphous Silicon Films Exhibiting High Stability Against Light Soaking**

Satoshi Shimizu1,2, Michio Kondo1 and Akihisa Matsuda3 *1Research Center for Photovoltaics, National Institute of Advanced Industrial Science and Technology 2Max-Planck-Institut für extraterrestrische Physik 3Graduate School of Engineering Science, Osaka University 1,3Japan 2Germany* 
