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**Chapter 0**

**Chapter 9**

**Post Deposition Heat Treatment Effects on Ceramic**

**Superconducting Films Produced by Infrared**

Jeffrey C. De Vero, Rusty A. Lopez, Wilson O. Garcia and Roland V. Sarmago

Pulsed laser deposition (PLD) has become a potential method in fabricating highly quality superconducting thin films suitable for electronic applications such as in Josephson junctionbased electronics and in second generation coated conductors [11, 12, 14, 20, 23]. PLD of high *Tc* superconductors generally utilize excimer lasers in the ultraviolet (UV) range [6, 11] . However, excimer lasers use toxic gases such as Cl and F for excitation. In contrast, flash lamp pumped Nd:YAG laser can provide stable power and better beam profile [14, 20]. Nd: YAG lasers are also easy to operate and have low maintenance costs [2, 14, 20]. To date, the third harmonic (355 nm) and fourth harmonic (266 nm) of the Nd:YAG has been used to grow high

In UV PLD of Bi-Sr-Ca-Cu-O films, the substrates are usually heated to 8000*C* followed by in-situ and ex-situ post heat treatments in gas atmospheres [1, 13, 22, 29]. Reports have shown that Bi- content of the film is greatly influenced by the substrate temperature and can be highly deficient at higher temperatures [1, 29]. In some cases, heat treatment during deposition results in the contamination of the film especially on Si substrates [6]. PLD of *YBa*2*Cu*3*O*7−*<sup>δ</sup>* using UV lasers produce films with *Tc* of 90 K require substrate heating ranging from 700- 8000C in a background *O*<sup>2</sup> gas (pressure of ranging from 100 to 200 mTorr) [6, 7, 32]. This is usually done since Y-Ba-Cu-O is highly dependent on oxygen content. This process is either performed in-situ or ex-situ and part of the post heat treatment [4, 18]. These results implies that post heat treatment is necessary to homogenize the composition of the film and improve

Recently, we reported the fabrication of micron thick *Bi*2*Sr*2*CaCu*2*O*8+*<sup>δ</sup>* (Bi-2212) and Yttrium doped Bi-22Y2 through PLD with a 1064 nm Nd:YAG laser [9, 10]. The films underwent heat treatment outside the PLD growth chamber to produce flat and highly c-axis oriented films with stoichiometries identical to the targets. In the case of Bi-2212, the measured *Tc* is

> ©2012 De Vero et al., licensee InTech. This is an open access chapter distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly

©2012 De Vero et al., licensee InTech. This is a paper distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

**Nd:YAG Pulsed Laser Deposition**

Additional information is available at the end of the chapter

quality high-Tc superconducting films [12, 14, 20].

cited.

the critical temperarure *Tc* [1, 4, 19]

http://dx.doi.org/10.5772/51291

**1. Introduction**
