**6. Conclusions**

544 Smart Actuation and Sensing Systems – Recent Advances and Future Challenges

velocity differences:

uncoupling.

Rotational mode:

Translational mode

The eight geophones measurements on stage and frame are elaborated to obtain four

*DX SensSX SensFX DX SensSX SensFX DY SensSY SensFY DY SensSY SensFY*

These values are then summed and subtracted in order to obtain the motion mode

*RX DX DX RY DY DY*

*TX DX DX TY DY DY*

The control dynamic is the same of Lead-Lag approach, the difference consisting in the error fed to the controller. The poles of the system in open and closed loop are reported in Table 4.

**Figure 25.** Modal control. a) Control command to stage-frame velocities difference transfer function. b) Control command to translational dynamics transfer function. c) Control command to rotational

dynamics transfer function. Solid line: open loop. Dashed line: closed loop.

= −

*VV V VV V*

= + = +

+ − + −

+ − + −

*VV V VV V*

= − = − = − = −

+++ −−− +++ −−−

(37)

(38)

= − (39)

*VV V VV V VV V VV V*

> In this chapter the design of three different control techniques for vibration damping and active isolation for high precision laser cutting machines has been illustrated. After an overview on the main actuation technologies in this field the work explains the advantages of electromechanical actuators and focuses on the mechatronics approach of the machine subsystem design. For controller implementation, two different models (four and six degrees of freedom) have been developed. The considered controllers are:


Experimental and simulation results used to check the effectiveness of the modeling approach and of the three proposed control techniques.
