**8. Disclaimer**

Certain commercial equipment, instruments, or materials are identified in this document. Such identification does not imply recommendation or endorsement by the US Department of Energy, BNL, nor does it imply that the products identified are necessarily the best available for the purpose.

#### **9. Acknowledgment**

108 Modern Metrology Concerns

reverse directions with the mirror rotated to the 180 and 0 orientations. Correcting these slow drift effects greatly improves the accuracy of the measurement. A project is underway to design a next-generation optical profiler that will incorporate an automated mirror rotation mechanism into the system so as to avoid operator intervention between scans

**7.3 Temperature stabilization: arrange unavoidable thermal sources in enclosure only**  It is better to keep unstable thermal sources outside the enclosure of the profiler as much as

It is necessary to apply monolithic wave-front splitting beam splitter (WSBS) to maintain

a. When USB is plugged in, the temperature of the CCD control board increases by 6.5°C; and the temperature of the CCD chip board varies by about 2.5°C (Fig. 28 a). However, both stabilize after about 30 minutes. The CCD chip board has to be set inside optical head in order to record the images, but it is possible to set the control board outside the optical head. The CCD should be turned on all the time in order to keep the

b. Diode laser has very low power consumption, but it is still a considerable thermal source. Its temperature rise is about 1°C after turn on (Fig. 28 b). Again, it is better to place the diode laser outside of the enclosure and keep it switched on all the time for

Fig. 28. a) Temperature variations of CCD board and control board; b) Temperature rising of

23.2 23.4 23.6 23.8 2 4 24.2

temperature (LC)

0 500 1000 1500

time (sec)

Diode Laser tem perature <5m w , Just turning on, tested on housing

Certain commercial equipment, instruments, or materials are identified in this document. Such identification does not imply recommendation or endorsement by the US Department of Energy, BNL, nor does it imply that the products identified are necessarily the best

Following is temperature variations of light source and CCD camera for reference:

possible. The best choice: No drive motor is placed inside the enclosure.

(Yashchuk, 2011).

good thermal stability.

temperature stable.

 Tem perature rising a) on C CD board (U SB plug: on-off-on) b) on Control board (U SB Plug on)

stabilization.

diode laser

**8. Disclaimer** 

temperature (LC)

0 500 1000 1500 2000 2500 3000

time (sec)

1 CC D Chip C on trol board

a) b)

available for the purpose.

Notice: This manuscript has been authored by Brookhaven Science Associates, LLC under Contract No. DE-AC02-98CH10886 with the U.S. Department of Energy. The United States Government retains, and the publisher, by accepting the article for publication, acknowledges, a world-wide license to publish or reproduce the published form of this manuscript, or allow others to do so, for the United States Government purposes.

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