**ION IMPLANTATION**

Edited by **Mark Goorsky** 

http://dx.doi.org/10.5772/1881 Edited by Mark Goorsky

#### **Contributors**

Irina Antonova, Yuancun Nie, Xueqing Yan, Yuanrong Lu, Jiaer Chen, Denis Rémiens, Abdul Majid, Umapada Pal, Ovidio Peña-Rodríguez, Sebastien Pezzagna, Katharina Lorenz, Elke Wendler, Valery Mikoushkin, Mercedes Carrascosa, Ángel García-Cabañes, Antonio Rivera, Fernando Agulló-López, José Olivares, Hans-Eberhard Zschau, Michael Schütze, Stefania Privitera, Akira Ueda, Moni Behar, Raul Fadanelli, Johnny F. Dias, Manfred Reiche, Uday Dadwal, Rajendra Singh, Anna Wolska, Denis Shamiryan, Dmitriy V. Likhachev, Caroline Moulet, Mark Goorsky

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#### **Notice**

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First published in Croatia, 2012 by INTECH d.o.o. eBook (PDF) Published by IN TECH d.o.o. Place and year of publication of eBook (PDF): Rijeka, 2019. IntechOpen is the global imprint of IN TECH d.o.o. Printed in Croatia

Legal deposit, Croatia: National and University Library in Zagreb

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Ion Implantation Edited by Mark Goorsky p. cm. ISBN 978-953-51-0634-0 eBook (PDF) ISBN 978-953-51-4292-8
