**Meet the editor**

Dr. Hong Shih, Senior Technology Director at Lam Research Corporation, received his Ph.D. in Metallurgy from the Pennsylvania State University in 1986. He was a Post Doctor and a Research Professor at University of Southern California. He holds B.S. in Chemistry from Beijing University in 1970 and M.S. in Electrochemistry from Academic Sinica in 1981. He has been working at

Applied Materials (1994-2002) and at Lam Research Corporation (2002-). He has 120 publications in the referred journals and books, 160 technical consulting reports,200 semiconductor equipment specifications and best known methods, 1,300 technical reports, and 190 USA and International Patents granted/published. His pioneer work in the study of materials under high density plasma opened a new scientific and engineering field. Dr. Shih is a well-known scientist on electrochemical impedance spectroscopy, corrosion monitoring and control, electrochemical techniques and expert in plasma resistance materials, anodized aluminum, surface coatings, precision wet cleaning, defect, particle, and metal contamination reduction on plasma etching equipment served in semiconductor wafer fabrication.

Contents

**Preface IX** 

Hong Shih

L.C. Tsao

Swe-Kai Chen

Chapter 1 **A Systematic Study and Characterization** 

Chapter 2 **Corrosion Resistance of Directionally** 

and Claudia Marcela Mendez

**of Advanced Corrosion Resistance Materials and Their Applications for Plasma Etching** 

**Solidified Casting Zinc-Aluminum Matrix 35** 

Alicia Esther Ares, Liliana Mabel Gassa

Chapter 3 **Corrosion Resistance of High Nitrogen Steels 55**  Roman Ritzenhoff and André Hahn

Chapter 4 **Tribocorrosion: Material Behavior Under Combined** 

**of AlxCoCrFeNi (x = 0, 0.25, 0.50, 1.00) High-Entropy Alloys in Sulfuric Acids 135** 

Chapter 5 **Corrosion Resistance of Pb-Free and Novel** 

Chapter 6 **Electrochemical Passive Properties** 

Chapter 7 **Reinforcement Fibers in Zinc-Rich** 

Carlos Alberto Giudice

Chapter 8 **Comparative Study of Porphyrin** 

**Conditions of Corrosion and Mechanical Loading 81**  Pierre Ponthiaux, François Wenger and Jean-Pierre Celis

**Nano-Composite Solders in Electronic Packaging 107** 

**Nano Lithiun Silicate Anticorrosive Coatings 157** 

Adina-Elena Segneanu, Ionel Balcu, Nandina Vlatanescu,

**Systems Used as Corrosion Inhibitors 175** 

Zoltan Urmosi and Corina Amalia Macarie

**Processes in Semiconductor Silicon Wafer Fabrication 1** 
