**2.3.1 B parameter measurement results**

Fig.14 shows B parameter measurement results. With KrF exposures, MET-1K and MET-2D yielded values of 0.726 and 0.788, respectively. With EUV exposures, MET-1K and MET-2D yielded 4.32 and 5.21, respectively, indicating greater absorption with EUV exposures.

Fig. 14. B parameter measurement results
