**2.3 Parameter measurement results**

We measured parameters using EUV chemically amplified resists MET-1K and MET-2D manufactured by Rohm and Haas.

Table 5 gives the process conditions.


Table 5. Measurement conditions

We measured parameters using EUV chemically amplified resists MET-1K and MET-2D

Fig. 13. PEB parameter measurement system

**2.3 Parameter measurement results** 

manufactured by Rohm and Haas. Table 5 gives the process conditions.

Table 5. Measurement conditions
