**5. References**


10 Lithography

a value of 0.27 was found. Compared to the maximal density obtained in the case of a hexagonal covering (0.90), the paving density of SA molecules is 30% of the maximal one

In this chapter, we demonstrated that the soft UV-NIL technique could fabricated gold nanodisks on large area (Ex: 1 mm2, and some cm2). The obtained dimensions of nanodisks are 80 nm of diameter, 250 nm of periodicity and 50 nm of height with the soft stamp designed with Si master mold. In addition, the system AAO and hexane-diluted PDMS demonstrated that it is a good candidate for UV-NIL stamp fabrication, because the advantages of using AAO are to realize inexpensive and efficient hexane-diluted PDMS stamps on large zones (some cm2). However, the quality of soft stamps realized with AAO must be improved in order to fabricate highly identical and well-defined nanostructures, which could be used for biological applications like bioplasmonics. A small change of the shape of Au nanodisks arrays was also observed after an annealing at 250 ◦C during 30 min which eliminates the process structural defects. A plasmonic streptavidin sensing with these gold nanodisks was studied. Finally, the gold nanodisks obtained by UV-NIL technique are very sensitive to biomolecules detection. Moreover, we could estimate the paving density of SA adsorbed on gold nanodisks. To finish, the soft UV nanoimprint lithography is very promising and

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for the incubation concentration used here (C*SA* = 1 nM).

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**4. Conclusion**

**5. References**

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**Part 2** 

**Lithographies for Biological Applications** 

