**Abstract**

This research study examines the effects of process parameters on fabricated triangular micro holes using micro-EDM (Micro Electrical Discharge Machining). The micro-EDM process utilized a 400 μm tungsten carbide electrode shaped as an equilateral triangle. The machining parameter assessment involved measuring errors in the corner radius and the included angle of the microcavity. The corner radius of the triangular microcavity ranged from 5 to 15 μm. Simultaneously, the included angle varied between 61 and 64°. These variations were attributed to adjustments in capacitance, voltage, and feed settings, which spanned from 1 nF, 90 V, and 5 μm to 100 nF, 130 V, and 15 μm, respectively. Statistical analysis using ANOVA revealed that voltage and capacitance significantly impacted the alterations in corner radii and included the angle of the manufactured triangular microcavities. FESEM is used to analyze the recast layer formation on the edges of the microcavity. It will help to decrease the error in fabricating triangular cavities using micro EDM.

**Keywords:** advanced manufacturing process, micromachining, micro EDM, triangular microcavity, ANOVA
