**Author details**

Divya Gupta1 \*, Usha Rani1 , Rahul Singhal<sup>2</sup> and Sanjeev Aggarwal1

1 Department of Physics, Ion Beam Centre, Kurukshetra University, Kurukshetra, India

2 Department of Physics, Malviya National Institute of Technology (MNIT), Jaipur, India

\*Address all correspondence to: divyagupta2017@kuk.ac.in

© 2023 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/3.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

*Oblique Ar+ Sputtered SiC Thin Films: Structural, Optical, and Electrical Properties DOI: http://dx.doi.org/10.5772/intechopen.112928*
