**Figure 2.**

*Raman spectra of (a) as grown SiC on Si(111), 80 keV argon-sputtered SiC surfaces for fluence of (b) 5 × 1017 Ar+ cm−2 and (c) 7 × 1017 Ar+ cm−2 in the wavenumber region 1100–1700 cm−1.*

